Measurement with nanometer resolution is required for the next advance in nanotechnology. Especially the non-contacting methods of measurement are very promising. The authors present the set-up of the laser interferometer with nanometer resolution. They developed three types of laser sources especially for using in laser interferometry and absolute laser interferometry. The standard He-Ne laser source for conventional laser interferometry techniques can be replaced by one of these tree types of laser sources. They used VertiCal Surface Emitting Laser (VCSEL) and Distributed Feed-Back (DFB) laser diodes to design these laser sources.