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Learning Module: Crystallography Overview for MEMS - Instructor Guides
27 Apr 2017 | | Contributor(s):: Southwest Center for Microsystems Education (SCME)
This learning module introduces the science of crystallography and its importance to microtechnology and the fabrication of microelectromechanical systems (MEMS). Four activities are provided that allow students to further explore several concepts of this science and "see" the...
Illinois ME 498 Introduction of Nano Science and Technology, Lecture 26: Nanomanufacturing 1: Semiconductor Manufacturing
20 Jan 2010 | | Contributor(s):: Nick Fang, Omar Sobh
Nanomaterials and Devices for Solar EnergyTopics: From Si crystals to Wafers From Wafers to Chips Photolithography: Definitions Optical Lithography Multi-Photon Lithography E-Beam Lithography Imprinting Lithography Scanning probe lithography Additive Processes Thermal Oxidation Diffusion Thermal...