  We report on the thermomechanical and thermal tuning properties of
curved-mirror Fabry-Perot resonators, fabricated by the guided assembly of
circular delamination buckles within a multilayer a-Si/SiO2 stack. Analytical
models for temperature dependence, effective spring constants, and mechanical
mode frequencies are described and shown to be in good agreement with
experimental results. The cavities exhibit mode volumes as small as
$\sim10\lambda^3$, reflectance-limited finesse $\sim3\times10^3$, and
mechanical resonance frequencies in the MHz range. Monolithic cavity arrays of
this type might be of interest for applications in sensing, cavity quantum
electrodynamics, and optomechanics.
