  We report on fabrication of on-chip calcium fluoride (CaF2) microdisk
resonators using water-assisted femtosecond laser micromachining. Focused ion
beam (FIB) milling is used to create ultra-smooth sidewalls. The quality
(Q)-factors of the fabricated microresonators are measured to be 4.2x10^4 at
wavelengths near 1550 nm. The Q factor is mainly limited by the scattering from
the bottom surface of the disk whose roughness remains high due to the
femtosecond laser micromachining process. This technique facilitates formation
of on-chip microresonators on various kinds of bulk crystalline materials,
which can benefit a wide range of applications such as nonlinear optics,
quantum optics, and chip-level integration of photonic devices.
