  Integration of single-photon emitters (SPEs) with resonant photonic
structures is a promising approach for realizing compact and efficient
single-photon sources for quantum communications, computing, and sensing.
Efficient interaction between the SPE and the photonic cavity requires that the
cavity's resonance matches the SPE emission line. Here we demonstrate a new
method for tuning silicon nitride (Si3N4) microring cavities via controlled
deposition of the cladding layers. Guided by numerical simulations, we deposit
silicon dioxide (SiO2) nanolayers onto Si3N4 ridge structures in steps of 50
nm. We show tuning of the cavity resonance over a free spectral range (FSR)
without degradation of the quality-factor (Q-factor) of the cavity. We then
complement this method with localized laser heating for fine-tuning of the
cavity. Finally, we verify that the cladding deposition does not alter the
position of nanoparticles placed on the cavity, which suggests that our method
can be useful for integrating SPEs with photonic structures.
