  Two mechanisms for the breakdown of step flow growth, in the sense of the
appearance of steps of opposite sign to the original vicinality, are studied by
kinetic Monte Carlo simulations and scaling arguments. The first mechanism is
the nucleation of islands on the terraces, which leads to mound formation if
interlayer transport is sufficiently inhibited. The second mechanism is the
formation of vacancy islands due to the self-crossing of strongly meandering
steps. The competing roles of the growth of the meander amplitude and the
synchronization of the meander phase are emphasized. The distance between
vacancy islands along the step direction appears to be proportional to the
square of the meander wavelength
