  We investigate the possibilities to realize light extraction from single
crystal diamond (SCD) nanopillars. This was achieved by dedicated 519 nm
laser-induced spin-state initiation of negatively charged nitrogen vacancies
(NV-). For the first time, we present possibility to perform effective
spin-readout of NV(-)s that were naturally generated by the growth process
during chemical vapor deposition (CVD) synthesis within SCD without any
post-growth implantation strategies. Applied diamond was neither implanted with
14N+, nor was the CVD synthesized SCD annealed, making the presence of nitrogen
vacancy a remarkable phenomenon. To investigate the possibility to realize
light extraction by the utilization of NV(-) bright photoluminescence at room
temperature and ambient conditions with the waveguiding effect, we have
performed a top-down nanofabrication of SCD by electron beam lithography (EBL)
and dry inductively-coupled plasma/ reactive ion etching (ICP-RIE) to generate
light focusing nanopillars. In addition, we have fluorinated the diamond's
surface by dedicated 0V ICP plasma. Light extraction and spin manipulations
were performed with photoluminescence (PL) spectroscopy and optically detected
magnetic resonance (ODMR) at room temperature. We have observed a remarkable
effect based on the selective 0V SF6 plasma etching and surprisingly, in
contrast to literature findings, deactivation of NV(-) centers. We discuss the
possible deactivation mechanism in detail regarding 2-dimensional hole gas
(2HG) and Fermi band bending.
