  We report a process for fabricating high quality, defect-free spherical
mirror templates suitable for developing high finesse optical Fabry-Perot
resonators. The process utilizes the controlled reflow of borosilicate glass
and differential pressure to produce mirrors with 0.3 nanometer surface
roughness. The dimensions of the mirrors are in the 0.5-5mm range making them
suitable candidates for integration with on-chip neutral atom and ion
experiments where enhanced interaction between atoms and photons are required.
Moreover the mirror curvature, dimension and placement is readily controlled
and the process can easily provide an array of such mirrors. We show that
cavities constructed with these mirror templates are well suited to quantum
information applications such as single photon sources and atom-photon
entanglement.
