  Plasma jets belong to the category remote plasma. This means that the
discharge conditions and the chemical effect on samples can be tuned
separately, this being a big advantage compared to standard low-pressure
reactors. The inductive coupling brings the advantage of a pure and dense
plasma. The microwave excitation allows furthermore miniaturization and
generation of low temperature plasmas. The present paper shows the state of the
art of the research on such sources, demonstrating their work up to atmospheric
pressure.
