  Widefield quantum diamond microscopy (WQDM) based on Kohler-illumination has
been widely adopted in the field of quantum sensing, however, practical
applications are still limited by issues such as unavoidable photodamage and
unsatisfied spatial-resolution. Here, we design and develop a super-resolution
enabled WQDM using a digital micromirror device (DMD)-based structured
illumination microscopy. With the rapidly programmable illumination patterns,
we have firstly demonstrated how to mitigate phototoxicity when imaging
nanodiamonds in cell samples. As a showcase, we have performed the
super-resolved quantum sensing measurements of two individual nanodiamonds not
even distinguishable with conventional WQDM. The DMD-powered WQDM presents not
only excellent compatibility with quantum sensing solutions, but also strong
advantages in high imaging speed, high resolution, low phototoxicity, and
enhanced signal-to-background ratio, making it a competent tool to for
applications in demanding fields such as biomedical science.
