  INTPIX4NA is an integration-type silicon-on-insulator pixel detector. This
detector has a 14.1 x 8.7 mm^2 sensitive area, 425,984 (832 column x 512 row
matrix) pixels and the pixel size is 17 x 17 um^2. This detector was developed
for residual stress measurement using X-rays (the cos alpha method). The
performance of INTPIX4NA was tested with the synchrotron beamlines of the
Photon Factory (KEK), and the following results were obtained. The modulation
transfer function, the index of the spatial resolution, was more than 50% at
the Nyquist frequency (29.4 cycle/mm). The energy resolution analyzed from the
collected charge counts is 35.3%--46.2% at 5.415 keV, 21.7%--35.6% at 8 keV,
and 15.7%--19.4% at 12 keV. The X-ray signal can be separated from the noise
even at a low energy of 5.415 keV at room temperature (approximately 25--27
degree Celsius). The maximum frame rate at which the signal quality can be
maintained is 153 fps in the current measurement system. These results satisfy
the required performance in the air and at room temperature (approximately
25--27 degree Celsius) condition that is assumed for the environment of the
residual stress measurement.
