  The relentless pursuit of understanding matter at ever-finer scales has
pushed optical microscopy to surpass the diffraction limit and produced the
super-resolution microscopy which enables visualizing structures shorter than
the wavelength of light. In the present work, we harnessed extreme ultraviolet
beams to create a sub-{\mu}m grating structure, which was revealed by extreme
ultraviolet structured illumination microscopy. This achievement marks the
first step toward extending such a super-resolution technique into the X-ray
regime, where achieving atomic-scale resolution becomes a charming possibility.
