  Results on the chemical composition, structure and growth kinetics of
titanium nitride (TiN) films deposited on mild steel substrates by pyrolytic
laser-induced chemical vapour deposition (LCVD) are presented. Golden coloured
lines of TiN were deposited from a reactive gas mixture of TiCl4, N2 and H2
using a continuous wave TEM00 CO2 laser beam as heat source. The chemical
composition and structure of the films were determined by electron probe
microanalysis (EPMA) and glancing incidence X-ray diffraction (GIXRD). A
non-contact laser profilometer was used to measure the thickness profiles of
the films. Using the data obtained in the steady-state region of the TiN
laser-written lines, growth rates in the range 3.7 to 6.9 micrometers per
second were deduced. The Arrhenius relation between the deposition rate and the
deposition temperature yields an apparent activation energy of 46.9(+-)3.8
kJ.mol-1. This result enabled us to conclude that under our deposition
conditions the LCVD of TiN is controlled by mass transport in the vapour phase.
  Keywords: Coatings; Titanium nitride (TiN); Laser chemical vapour deposition
(LCVD); Growth mechanisms.
