  Using kinetic Monte-Carlo simulations of a Solid-on-Solid model we
investigate the influence of step edge diffusion (SED) and evaporation on
Molecular Beam Epitaxy (MBE). Based on these investigations we propose two
strategies to optimize MBE-growth. The strategies are applicable in different
growth regimes: during layer-by-layer growth one can reduce the desorption rate
using a pulsed flux. In three-dimensional (3D) growth the SED can help to grow
large, smooth structures. For this purpose the flux has to be reduced with time
according to a power law.
