  We present the design, fabrication, and response of a low-power,
polymer-based VOC sensor based on the self-leveling of mechanically leveraged
structures. The device utilizes folded polymer-coated microcantilevers to
achieve passive temperature compensation without the need for additional
compensating sensors or electronics. We demonstrate that a self-leveling vapor
sensor provides the same gas response as a simple microcantilever geometry,
showing ~20% change in device capacitance when subjected to 35-85 %RH change
while showing nearly-zero baseline drift due to changes in ambient temperature
when the temperature is increased from 23-72{\deg}C which is ~52-fold better
than a simple microcantilever geometry. The response of the VOC sensor was
measured using three polymers (Polyimide, Polyurethane, and PDMS) against five
different analytes (Ethanol, Acetone, Benzene, Hexane, and Water) and an
SVM-based model was used to show target specificity. The sensor also showed an
absorption response time ({\tau}90) of ~138s. We propose that the self-leveling
vapor sensor geometry is a significant improvement to a simple microcantilever
vapor sensor as it offers the same performance but shows near-complete
elimination of temperature-induced baseline drift.
