  Nanomechanical resonator-based sensing devices are used in medical
diagnostics based on their high-frequency dynamic behavior. Cantilevers fall
into the category of Nanomechanical resonators. It also resembles a resonator
whose shape is like that of a nanowire clamped at one end. As the
surface-to-volume ratio of a nanowire resonator increases due to scaling down,
surface stress plays a crucial role in the mechanical behavior of a resonator.
Piezoresistive MEMS cantilevers are used for vapor phase analysis of volatile
compounds and gas. Studies were done to address the mass sensitivity issues and
fractures associated with bioceramic and nanocomposite coatings-based
cantilever resonators. The studies show how the sensing performance can be
determined or tuned. Nanomechanical studies of thin films of SiCN on silicon
were performed. The sharpness of the tip was found to have an influence on the
tip-sample conduction mechanism useful for MEMS applications
