  In order to develop an electro-optic waveguide, Pb(Zr, Ti)O3 ceramic
ferroelectric thin films were elaborated by a modified sol-gel process on glass
substrate. In the aim to study the optical properties of the PZT films, an
accurate refractive index and thickness measurement apparatus was set up, which
is called M-lines device. An evaluation of experimental uncertainty and
calculation of the precision of the refractive index and thickness were
developed on PZT layers. Two different processes of PZT elaboration were made
and studied with this apparatus. The reproducibility of one fabrication process
was tested and results are presented in this paper.
