  Scanning Transmission Electron Microscopy (STEM) has become the main stay for
materials characterization on atomic level, with applications ranging from
visualization of localized and extended defects to mapping order parameter
fields. In the last several years, attention was attracted by potential of STEM
to explore beam induced chemical processes and especially manipulating atomic
motion, enabling atom-by-atom fabrication. These applications, as well as
traditional imaging of beam sensitive materials, necessitate increasing dynamic
range of STEM between imaging and manipulation modes, and increasing absolute
scanning/imaging speeds, that can be achieved by combining sparse sensing
methods with non-rectangular scanning trajectories. Here we developed a general
method for real-time reconstruction of sparsely sampled images from high-speed,
non-invasive and diverse scanning pathways. This approach is demonstrated on
both the synthetic data where ground truth is known and the experimental STEM
data. This work lays the foundation for future tasks such as optimal design of
dose efficient scanning strategies and real-time adaptive inference and control
of e-beam induced atomic fabrication.
