  Laser beam scanning is central to many applications, including displays,
microscopy, three-dimensional mapping, and quantum information. Reducing the
scanners to microchip form factors has spurred the development of
very-large-scale photonic integrated circuits of optical phased arrays and
focal plane switched arrays. An outstanding challenge remains to simultaneously
achieve a compact footprint, broad wavelength operation, and low power
consumption. Here, we introduce a laser beam scanner that meets these
requirements. Using microcantilevers embedded with silicon nitride nanophotonic
circuitry, we demonstrate broadband, one- and two-dimensional steering of light
with wavelengths from 410 nm to 700 nm. The microcantilevers have ultracompact
~0.1 mm$^2$ areas, consume ~31 to 46 mW of power, are simple to control, and
emit a single light beam. The microcantilevers are monolithically integrated in
an active photonic platform on 200-mm silicon wafers. The
microcantilever-integrated photonic circuits miniaturize and simplify light
projectors to enable versatile, power-efficient, and broadband laser scanner
microchips.
