  Results of beam tests with planar silicon pixel sensors aimed towards the
ATLAS Insertable B-Layer and High Luminosity LHC (HL-LHC) upgrades are
presented. Measurements include spatial resolution, charge collection
performance and charge sharing between neighbouring cells as a function of
track incidence angle for different bulk materials. Measurements of n-in-n
pixel sensors are presented as a function of fluence for different
irradiations. Furthermore p-type silicon sensors from several vendors with
slightly differing layouts were tested. All tested sensors were connected by
bump-bonding to the ATLAS Pixel read-out chip. We show that both n-type and
p-type tested planar sensors are able to collect significant charge even after
integrated fluences expected at HL-LHC.
