  Inverse Compton scattering (ICS) can obtain quasi-monochromatic and
directional EUV radiation via a MeV-scale energy electron beam and a
micron-scale wavelength laser beam, which enables a dramatic reduction in
dimension and expense of the system, and makes it an attractive technology in
research, industry, medicine and homeland security. Here we propose an EUV
source based on high repetition ICS system. The scheme exploits the output from
the laser-electron interaction between a MW-ps laser at MHz repetition-rate and
a high quality electron beam with an energy of a few MeV at MHz
repetition-rate.
