  We report on the transient-enhanced shape transformation of nano-structured
Si(001) surfaces upon in vacuo annealing at relatively low temperatures of
1175K - 1225K for a few minutes. We find dramatic surface mass transport
concomitant with the development of low-energy facets on surfaces that are
covered by native oxide. The enhanced surface mass transport ceases after the
oxide is completely desorbed, and it is also not observed on surfaces where the
native oxide had been removed by HF before annealing.
