  We have developed a continuum model that explains the complex surface shapes
observed in epitaxial regrowth on micron scale gratings. This model describes
the dependence of the surface morphology on film thickness and growth
temperature in terms of a few simple atomic scale processes including adatom
diffusion, step-edge attachment and detachment, and a net downhill migration of
surface adatoms. The continuum model reduces to the linear part of the
Kardar-Parisi-Zhang equation with a flux dependent smoothing coefficient in the
long wavelength limit.
