  Phthalocyanines as organic semiconductors and molecular magnets provide
plenty of industrial or high-tech applications from dyes and pigments up to gas
sensors, molecular electronics, spintronics and quantum computing. Copper
phthalocyanine (CuPc) belongs among the most used phthalocyanines, typically in
the form of powder or films but self-grown nanowires are also known. Here we
describe an opposite, i.e., top-down approach based on fabrication of ordered
arrays of CuPc microstructures (microdisks) using electron beam lithography and
other steps. Among critical points of this approach belongs a choice of a
proper resist and a solvent. Fabricated CuPc microdisks have a diameter of 5
${\mu}$m and heights from 7 up to 70 nm. Micro-Raman spectroscopy of the films
and microdisks reveals a crystalline ${\beta}$ phase associated with a
paramagnetic form. Additional measurements with an increasing laser power show
a significant shift (${\Delta}{\omega}$ ~ 7.1 cm$^{-1}$ ) and broadening of a
peak at 1532 rel$\cdot$cm$^{-1}$ corresponding to the phonon B1g mode. The
observed smooth changes exclude a phase transition and confirm the thermally
stable polymorph. Our versatile fabrication technique using the common
lithographic resist brings new possibilities for the fabrication of various
micro/nanostructures such as micromagnets, heterostructures or organic
electronic devices.
