  Superconducting qubits are a promising route to achieving large-scale quantum
computers. A key challenge in realising large-scale superconducting quantum
processors involves mitigating frequency collisions. In this paper, we present
an approach to tuning fixed-frequency qubits with the use of an electron beam
to locally anneal the Josephson junction. We demonstrate the ability to both
increase and decrease the junction barrier resistance. The technique shows an
improvement in wafer scale frequency targetting by assessing the frequency
collisions in our qubit architecture. Coherence measurements are also done to
evaluate the performance before and after tuning. The tuning process utilises a
standard electron beam lithography system, ensuring reproducibility and
implementation by any group capable of fabricating these Josephson junctions.
This technique has the potential to significantly improve the performance of
large-scale quantum computing systems, thereby paving the way for the future of
quantum computing.
