  The scalability of optical addressing is one of the key challenges for the
large-scale trapped-ion quantum computing (QC). Metasurfaces is a promising
solution due to excellent optical performance, integration, and
miniaturization. Here, we propose and numerically demonstrate a design of
integrated scalable metalens array (ISMA) working in the UV 350nm range for
optical addressing. These ISMAs can focus the collimated individual addressing
beams array into diffraction-limited spots array, featuring crosstalk below
0.82%, focusing efficiency as high as 36.90%. For various applications, the
x-polarized, polarization-insensitive and right-handed circularly polarized
ISMA are designed. The design proposed in this paper can also find applications
in optical trapping.
