  This paper presents realistic system-level modelling and simulation of
effective noise sources in a coupled resonating MEMS sensors. A governing set
of differential equations are used to build a numerical model of a mechanical
noise source in a coupled-resonator sensor. An effective thermomechanical noise
is then quantified through the system-level simulation obtained via Simulink.
On a similar note, various noise sources in electronic readout are identified
and the contribution of each is quantified to determine an effective noise that
stems from the electronic readout. A comparison between an effective mechanical
and electronic noise aids in identifying the dominant noise source in a sensor
system. A method to optimize the system noise floor for an amplitude-based the
readout is presented. The proposed models present a variety of operating
conditions, such as finite quality factor, varying coupled electric spring
strength, and operation with in-phase and out-of-phase mode. The proposed
models aim to determine the impact of fundamental noise processes and thus
quantify the ultimate detection limit into a coupled resonating system used for
various sensing applications.
