  We report on a modified transfer technique for atomically thin materials
integrated onto microelectromechanical systems (MEMS) for studying strain
physics and creating strain-based devices. Our method tolerates the non-planar
structures and fragility of MEMS, while still providing precise positioning and
crack free transfer of flakes. Further, our method used the transfer polymer to
anchor the 2D crystal to the MEMS, which reduces the fabrication time,
increases the yield, and allowed us to exploit the strong mechanical coupling
between 2D crystal and polymer to strain the atomically thin system. We
successfully strained single atomic layers of molybdenum disulfide (MoS$_2$)
with MEMS devices for the first time and achieved greater than 1.3\% strain,
marking a major milestone for incorporating 2D materials with MEMS We used the
established strain response of MoS$_2$ Raman and Photoluminescence spectra to
deduce the strain in our crystals and provide a consistency check. We found
good comparison between our experiment and literature.
