  In the recent years, metasurfaces, being flat and lightweight, have been
designed to replace bulky optical components with various functions. We
demonstrate a monolithic Micro-Electro-Mechanical System (MEMS) integrated with
a metasurface-based flat lens that focuses light in the mid-infrared spectrum.
A two-dimensional scanning MEMS platform controls the angle of the lens along
the two orthogonal axes (tip-tilt) by +-9 degrees, thus enabling dynamic beam
steering. The device can compensate for off-axis incident light and thus
correct for aberrations such as coma. We show that for low angular
displacements, the integrated lens-on-MEMS system does not affect the
mechanical performance of the MEMS actuators and preserves the focused beam
profile as well as the measured full width at half maximum. We envision a new
class of flat optical devices with active control provided by the combination
of metasurfaces and MEMS for a wide range of applications, such as miniaturized
MEMS-based microscope systems, LIDAR scanners, and projection systems.
