  We present a new YAuSi Liquid Metal Alloy Ion Source (LMAIS), generating
focused ion beams of yttrium ions, and its prospective applications for
nanofabrication, sample preparation, lithographic and implantation processes.
Working parameters of the AuSiY LMAIS are similar to other gold-silicon based
LMAIS. We found anomalously high emission current of triple charged Yttrium
ions. Influence of Yttrium implantation on optical qualities of the implanted
ion-ensembles is shown in luminescence of co-implanted Erbium ions.
