  The transport of sputtered aluminum inside a multi frequency capacitively
coupled plasma chamber is simulated by means of a kinetic test multi-particle
approach. A novel consistent set of scattering parameters obtained for a
modified variable hard sphere collision model is presented for both argon and
aluminum. An angular dependent Thompson energy distribution is fitted to
results from Monte Carlo simulations and used for the kinetic simulation of the
transport of sputtered aluminum. For the proposed configuration the transport
of sputtered particles is characterized under typical process conditions at a
gas pressure of p=0.5 Pa. It is found that -- due to the peculiar geometric
conditions -- the transport can be understood in a one dimensional picture,
governed by the interaction of the imposed and backscattered particle fluxes.
It is shown that the precise geometric features play an important role only in
proximity to the electrode edges, where the effect of backscattering from the
outside chamber volume becomes the governing mechanism.
