  High-performance photonic switches are essential for large-scale optical
routing for AI large models and Internet of things. Realizing nonvolatility can
further reduce power consumption and expand application scenarios. We propose a
nonvolatile 2*2 silicon photonic micro-electromechanical system (MEMS) switch
compatible with standard silicon photonic foundry processes. The switch employs
electrostatic comb actuator to change the air gap of the compact horizontal
adiabatic coupler and achieves nonvolatility with centrally-clamped stepped
bistable mechanical beams. The photonic switch features a 10s us-scale
switching speed and a 10s fJ-scale simulated switching energy within a 100*100
um2 footprint, with <=26 V driving voltages. This 2*2 switch can be used in a
variety of topologies for large-scale photonic switches, and its nonvolatility
can potentially support future photonic FPGA designs.
