  Circular and linear zone plates have been fabricated on the surface of
silicon crystals for the energy of 8 keV by electron beam lithography and deep
ion plasma etching methods. Various variants of compound zone plates with
first, second, third diffraction orders have been made. The zone relief height
is about 10 mkm, the outermost zone width of the zone plate is 0.4 mkm. The
experimental testing of the zone plates has been conducted on SPring-8 and ESRF
synchrotron radiation sources. A focused spot size and diffraction efficiency
measured by knife-edge scanning are accordingly 0.5 mkm and 39% for the first
order circular zone plate.
