  Integration of Samarium Cobalt hard magnets on silicon requires
buffer/protective layers that can enhance the magnetic properties of the magnet
while preserving its structure and chemical composition after post-annealing
treatments needed for the formation of the magnetically hard phase. In this
work, a comparison of Samarium-Cobalt films for five different
buffer/protective layers, namely Ti, W, TiW, Ta, Cr and two different annealing
temperatures, 650{\deg}C and 750{\deg}C, is presented. Depending on materials
and annealing temperatures, magnetic properties such as saturation and
coercivity of the SmCo film can be finely tuned. We show that coercivity up to
3.65 T or saturation magnetization up to 0.95 T can be reached by proper choice
of the relevant process parameters: deposition temperature, material for the
buffer/protective layer and annealing temperature. Such value of coercivity is
among the highest found in literature for thin films of SmCo.
