  Microsystems become part of everyday life but their application is restricted
by lack of strong and fast motors (actuators) converting energy into motion.
For example, widespread internal combustion engines cannot be scaled down
because combustion reactions are quenched in a small space. Here we present an
actuator with the dimensions 100x100x5 um^3 that is using internal combustion
of hydrogen and oxygen as part of its working cycle. Water electrolysis driven
by short voltage pulses creates an extra pressure of 0.5-4 bar for a time of
100-400 us in a chamber closed by a flexible membrane. When the pulses are
switched off this pressure is released even faster allowing production of
mechanical work in short cycles. We provide arguments that this unexpectedly
fast pressure decrease is due to spontaneous combustion of the gases in the
chamber. This actuator is the first step to truly microscopic combustion
engines.
