  The random layer thickness variations can induce a great deformation of the
experimental reflection of broadband extreme ultraviolet multilayer. In order
to reduce this influence of random layer thickness fluctuations, the
multiobjective genetic algorithm has been improved and used in the robust
design of multilayer with a broad angular bandpass. The robust multilayer with
a lower sensitivity to random thickness errors have been obtained and the
corresponding multilayer mirrors were fabricated. The experimental results of
robust Mo/Si multilayer with a wide angular band were presented and analyzed,
and the advantage of robust multilayer design was demonstrated.
