  Customized voltage waveforms composed of a number of frequencies and used as
the excitation of radio-frequency plasmas can control various plasma parameters
such as energy distribution functions, homogeneity of the ionflux or ionization
dynamics. So far this technology, while being extensively studied in academia,
has yet to be established in applications. One reason for this is the lack of a
suitable multi-frequency matching network that allows for maximum power
absorption for each excitation frequency that is generated and transmitted via
a single broadband amplifier. In this work, a method is introduced for
designing such a network based on network theory and synthesis. Using this
method, a circuit simulation is established that connects an exemplary matching
network to an equivalent circuit plasma model of a capacitive radio-frequency
discharge. It is found that for a range of gas pressures and number of
excitation frequencies the matching conditions can be satisfied, which proves
the functionality and feasibility of the proposed concept. Based on the
proposed multi-frequency impedance matching, tailored voltage waveforms can be
used at an industrial level.
