  Atomic devices such as atomic clocks and optically-pumped magnetometers rely
on the interrogation of atoms contained in a cell whose inner content has to
meet high standards of purity and accuracy. Glass-blowing techniques and
craftsmanship have evolved over many decades to achieve such standards in
macroscopic vapor cells. With the emergence of chip-scale atomic devices, the
need for miniaturization and mass fabrication has led to the adoption of
microfabrication techniques to make millimeter-scale vapor cells. However, many
shortcomings remain and no process has been able to match the quality and
versatility of glass-blown cells. Here, we introduce a novel approach to
structure, fill and seal microfabricated vapor cells inspired from the
century-old approach of glass-blowing. In particular we demonstrate opening and
closing single-use zero-leak microfabricated valves, actuated exclusively by
laser, and operating in the same way as the "make-seals" and "break-seals"
found in the filling apparatus of traditional cells. Such structures are
employed to fill cesium vapor cells at the wafer-level. The make-seal structure
consists of a glass membrane that can be locally heated and deflected to seal a
microchannel. The break-seal is obtained by breaching a silicon wall between
cavities. This new approach allows adapting processes previously restricted to
glass-blown cells. It can also be extended to vacuum microelectronics and
vacuum-packaging of micro-electro-mechanical systems (MEMS) devices.
