  We report on the development of commercially fabricated multi-chroic antenna
coupled Transition Edge Sensor (TES) bolometer arrays for Cosmic Microwave
Background (CMB) polarimetry experiments. The orders of magnitude increase in
detector count for next-generation CMB experiments requires a new approach in
detector wafer production to increase fabrication throughput.
  We describe collaborative efforts with a commercial superconductor
electronics fabrication facility (SeeQC, Inc.) to fabricate antenna coupled TES
bolometer detectors. We have successfully fabricated an operational
dual-polarization, dichroic sinuous antenna-coupled TES detector array on a 150
mm diameter wafer. The fabricated detector arrays have average yield of 95\%
and excellent uniformity across the wafer. Both RF characteristics and TES
bolometer properties are suitable for CMB observations. We successfully
fabricated different types of TES bolometers optimized for
frequency-multiplexing readout, time-domain multiplexing readout, and microwave
SQUID multiplexing readout. We also demonstrated high production throughput. We
discuss the motivation, design considerations, fabrication processes, test
results, and how industrial detector fabrication could be a path to fabricate
hundreds of detector wafers for future CMB polarimetry experiments.
