  Atom probe tomography is a powerful tools in investigating nanostructures
such as interfaces and nanoparticles in material science. Advanced analysis
tools are particularly useful for analyzing these nanostructures characterized
very often by curved shapes. However, these tools are very limited for complex
materials with non-negligible peak overlaps in their respective mass-to-charge
ratio spectra. Usually, an analyst solves peak overlaps in the bulk regions but
the behavior at interfaces is rarely considered. Therefore, in this work we
demonstrate how the proximity histogram generated for a specific interface can
be corrected by using the natural abundances of isotopes. This leads to
overlap-solved proximity histograms with a resolution of up to 0.1 nm. This
work expands on previous work that showed the advantage of a maximum likelihood
peak overlap solving. The corrected proximity histograms together with the
maximum likelihood peak overlap algorithm were implemented in an user-friendly
software suite called EPOSA.
