  We present a newly developed methodology using computer-readable fiducial
markers to allow images from multiple imaging modalities to be registered
automatically. This methodology makes it possible to correlate images from many
surface imaging techniques to provide an unprecedented level of surface detail
on a nanometre scale that no one technique can provide alone. This methodology
provides the capability to navigate to specific areas of interest when
transferring samples from machine to machine seamlessly. Then taking data
acquired from Scanning Electron Microscope (SEM), Secondary Ion Mass
Spectrometry (SIMS), x-ray Photoelectron Spectroscopy (XPS), Atomic Force
Microscopy (AFM) and optical inspection tools and combining all the data
acquired to then generate a 3D data representative model of a surface.
