  Thin films of thulium and ytterbium-doped titanium oxide were grown by
metal-organic spray pyrolysis deposition from titanium(IV)oxide
bis(acetylacetonate), thulium(III) tris(2,2,6,6-tetramethyl-3,5-heptanedionate)
and ytterbium(III) tris(acetylacetonate). Deposition temperatures have been
investigated from 300{\deg}C to 600{\deg}C. Films have been studied regarding
their crystallity and doping quality. Structural and composition
characterisations of TiO2:Tm,Yb were performed by electron microprobe, X-ray
diffraction and Fourier transform infrared spectroscopy. The deposition rate
can reach 0.8 \mum/h. The anatase phase of TiO2 was obtained after synthesis at
400{\deg}C or higher. Organic contamination at low deposition temperature is
eliminated by annealing treatments.
