  We measured the local composition and thickness of SiO2-based glass material
from diffraction. By using four dimensional scanning transmission electron
microscopy (4D-STEM), we obtained diffraction at each scanning point. Comparing
the obtained diffraction with simulated diffraction patterns, we try to measure
the local composition and thickness. Although this method requires some
constraints, this method measured local composition and thickness with 1/10 or
less electron dose of EELS.
