  This article introduces a thin-film thermocouple temperature sensor with
symmetrical electrode structure. It uses PI film as a flexible substrate. Cu
film and CuNi film made by MEMS manufacturing process as positive and negative
electrodes. The device itself has the advantages of miniature, bendable and
fast response speed. To reduce the film resistance value. Conducting metal film
thickness and sputtering substrate temperature optimization experiments. The
critical dimensions of Cu/CuNi film are 650nm and 400nm. The best sputtering
substrate temperature for Cu/CuNi films is 100 degrees Celsius and 150 degrees
Celsius. Testing the adhesion of thin film thermocouples using the peel-off
method. The test result is 9.4N. Finally, the film thermocouple temperature
sensor is subjected to a temperature static calibration experiment. The result
shows that the actual potential difference error is within 1 degrees Celsius.
It belongs to the second class standard in the formulation of thermocouple
standards in my country. Through curve fitting, the corresponding relationship
between temperature and potential difference is more accurate.
