  Organic semiconductors have potentials for a broad range of applications;
however, it is difficult to be integrated with traditional inorganic material
to meet the need of further application. Based on low-temperature silicon
nitride (SiNx) deposition technique, here we demonstrate a hybrid structure
fabricated by directly depositing high-quality SiNx on organic polymer film
Poly[2-(2',5'-bis(2"-ethylhexyloxy)- phenyl) -1,4-phenylene vinylene]
(BEHP-PPV). Stacked BEHP-PPV/SiNx hybrid structures with different periods are
obtained and their optical properties are systematically characterized.
Moreover, a group of BEHP/PPV embedded SiNx micro-disk is fabricated and
amplification of spontaneous emission (ASE) is observed under optical pumping,
further confirming that the gain properties of BEHP/PPV are well preserved. Our
technique offers a platform to fabricate organic/inorganic hybrid optical
devices compatible with integrated components.
