  We present electrothermal microelectromechanical (MEMS) actuators as a
practical platform for straining 2D materials. The advantages of the
electrothermal actuator is its high output force and displacement for low input
voltage, but its drawback is that it is actuated by generating high amounts of
heat. It is crucial to mitigate the high temperatures generated during
actuation for reliable 2D material strain device implementation. Here, we
implement a chevron actuator design that incorporates a thermal isolation stage
in order to avoid heating the 2D material from the high temperatures generated
during the actuation. By comparing experiment and simulation, we ensure our
design does not compromise output displacement, while keeping the 2D material
strain device stage cool. We also provide a simple analytical model useful for
quickly evaluating different thermal isolation stage designs.
