  Characterization of the minute cosmic microwave background polarization
signature requires multi-frequency, high-throughput precision instrument
systems. We have previously described the detector fabrication of a 40 GHz
focal plane and now describe the fabrication of detector modules for
measurement of the CMB at 90 GHz. The 90 GHz detectors are a scaled version of
the 40 GHz architecture where, due to smaller size detectors, we have
implemented a modular (wafer level) rather than the chip-level architecture.
The new fabrication process utilizes the same design rules with the added
challenge of increased wiring density to the 74 TES's as well as a new wafer
level hybridization procedure. The hexagonally shaped modules are tile-able,
and as such, can be used to form the large focal planes required for a
space-based CMB polarimeter. The detectors described here will be deployed in
two focal planes with 7 modules each in the Johns Hopkins University led
ground-based Cosmology Large Angular Scale Surveyor (CLASS) telescope.
