  In this paper, the possibility of determining the thermal, elastic and
geometric characteristics of a thin TiO2 film deposited on a silicon substrate,
thickness 30 mikrons, in the frequency range of 20 to 20 kHz with neural
networks was analyzed. For this purpose, the substrate parameters remained the
known and constant in the two-layer model and nano layer thin-film parameters
were changed: thickness, expansion and thermal diffusivity. Prediction of these
three parameters was analyzed separately with three neural networks and all of
these together by fourth neural network. It was shown that neural network,
which analyzed all three parameters at the same time, achieved the highest
accuracy, so the use of networks that provide predictions for only one
parameter is less reliable.
