  In the 21st century, biosensors have gathered much wider attention than ever
before, irrespective of the technology that promises to bring them forward.
With the recent COVID-19 outbreak, the concern and efforts to restore global
health and well-being are rising at an unprecedented rate. A requirement to
develop precise, fast, point-of-care, reliable, easily disposable/reproducible
and low-cost diagnostic tools have ascended. Biosensors form a primary element
of hand-held medical kits, tools, products, and/or instruments. They have a
very wide range of applications such as nearby environmental checks, detecting
the onset of a disease, food quality, drug discovery, medicine dose control,
and many more. Thischapter explains how Nano/Micro-Electro-Mechanical Systems
(N/MEMS) can be enabling technology towards a sustainable, scalable,
ultra-miniaturized, easy-to-use, energy efficient, and integrated bio/chemical
sensing system. This study provides a deeper insight into the fundamentals,
recent advances, and potential end applications of N/MEMS sensors and
integrated systems to detect and measure the concentration of biological and/or
chemical analytes. Transduction principle/s, materials, efficient designs
including readout technique, and sensor performance are explained. This is
followed by a discussion on how N/MEMS biosensors continue to evolve. The
challenges and possible opportunities are also discussed.
