  A thermal model of chemical vapor deposition of titanium nitride (TiN) on the
spherical particle surface under irradiation by a nanosecond laser pulse is
presented in this paper. Heat and mass transfer on a single spherical metal
powder particle surface subjected to temporal Gaussian heat flux is
investigated analytically. The chemical reaction on the particle surface and
the mass transfer in the gas phase are also considered. The surface
temperature, thermal penetration depth, and deposited film thickness under
different laser fluence, pulse width, initial particle temperature, and
particle radius are investigated. The effect of total pressure in the reaction
chamber on deposition rate is studied as well. The particle-level model
presented in this paper is an important step toward development of multiscale
model of LCVI.
