  Scanning probe microscopy using nitrogen vacancy (NV) centers in diamond has
become a versatile tool with applications in physics, chemistry, life sciences
and earth and planetary sciences. However, the fabrication of diamond scanning
probes with high photon collection efficiency, NV centers with long coherence
times and integrated radio frequency (RF) remains challenging due to the small
physical dimensions of the probes and the complexity of the fabrication
techniques. In this work, we present a simple and robust method to reliably
fabricate probes that can be integrated with conventional quartz tuning fork
based sensors as well as commercial silicon AFM cantilevers. For the first
time, an integrated RF micro-antenna for NV center spin manipulation is
directly fabricated onto the probe making the design versatile and compatible
with virtually all AFM instruments. This integration marks a complete sensor
package for NV center-based magnetometry, and opens up this newly developed
scanning probe technique to the broader scientific community.
