  The angular momentum of light can be described by positions on various
Poincar\'e spheres, where different structured light beams have proven useful
for numerous optical applications. However, the dynamic generation and control
of arbitrary structured light on different Poincar\'e spheres is still handled
via bulky optics in free space. Here we propose and demonstrate multimode
silicon photonic integrated meta-waveguides to generate arbitrary structured
light beams on polarization/orbit/higher-order/hybrid Poincar\'e spheres. The
multimode meta-waveguides are inversely designed to map polarization
states/higher-order spatial modes to orbit angular momentum, generating
polarization-/charge-diverse orbit angular momentum modes. Based on the
fundamental orbit angular momentum mode basis enabled by the meta-waveguides,
different structured-light fields on polarization/orbit/higher-order/hybrid
Poincar\'e spheres could be flexibly generated by controlling the relative
amplitude and phase profiles of on-chip guided modes. The demonstrated photonic
integrated devices hold great potential for the flexible manipulation of
structure light beams in many applications.
