  Nanorods grow in two modes through physical vapor deposition (PVD). In mode
I, monolayer surface steps dictate the diameter of nanorods. In mode II,
multiple-layer surface steps dictate the diameter, which is the smallest
possible under physical vapor deposition [X. B. Niu et al., Phys. Rev. Lett
110, 136102 (2013) and F. Du & H. C. Huang, Phys. Rev. Materials. 1, 033401
(2017)]. This paper reports closed-form theories of terrace lengths and nanorod
diameter during the growth in mode I, as a function of deposition conditions.
The accompanying lattice kinetic Monte Carlo simulations verify the theories.
This study reveals that (1) quasi-steady growth exists for each set of nanorod
growth condition, (2) the characteristic length scales, including terrace
lengths and nanorod diameter at the quasi-steady state, depend on the
deposition conditions - deposition rate F, substrate temperature T, and
incidence angle .
