  Compression of micro-pillars is followed in situ by a quick nano-focused
X-ray scanning microscopy technique combined with three-dimensional reciprocal
space mapping. Compared to other attempts using 2 X-ray nanobeams, it avoids
any motion or vibration that would lead to a destruction of the sample. The
technique consists of scanning both the energy of the incident nano-focused
X-ray beam and the in-plane translations of the focusing optics along the X-ray
beam. Here, we demonstrate the approach by imaging the strain and lattice
orientation of Si micro-pillars and their pedestals during in situ compression.
Varying the energy of the incident beam instead of rocking the sample and
mapping the focusing optics instead of moving the sample supplies a
vibration-free measurement of the reciprocal space maps without removal of the
mechanical load. The maps of strain and lattice orientation are in good
agreement with the ones recorded by ordinary rocking-curve scans.
Variable-wavelength quick scanning X-ray microscopy opens the route for in situ
strain and tilt mapping towards more diverse and complex materials
environments, especially where sample manipulation is difficult.
