  Microstructural characterization of synthetic periodic multilayers by x-ray
standing waves have been presented. It has been shown that the analysis of
multilayers by combined x-ray reflectometry (XRR) and x-ray standing wave (XSW)
techniques can overcome the deficiencies of the individual techniques in
microstructural analysis. While interface roughnesses are more accurately
determined by the XRR technique, layer composition is more accurately
determined by the XSW technique where an element is directly identified by its
characteristic emission. These aspects have been explained with an example of a
20 period Pt/C multilayer. The composition of the C-layers due to Pt
dissolution in the C-layers, Pt$_{x}$C$_{1-x}$, has been determined by the XSW
technique. In the XSW analysis when the whole amount of Pt present in the
C-layers is assumed to be within the broadened interface, it l eads to larger
interface roughness values, inconsistent with those determined by the XRR
technique. Constraining the interface roughness values to those determined by
the XRR technique, requires an additional amount of dissolved Pt in the
C-layers to expl ain the Pt fluorescence yield excited by the standing wave
field. This analysis provides the average composition Pt$_{x}$C$_{1-x}$ of the
C-layers .
