  The small silicon chip of Schottky diode (0.8x0.8x0.4 mm3) with planar
arrangement of electrodes (chip PSD) as temperature sensor, which functions
under the operating conditions of pressure sensor, was developed. The forward
I-V characteristic of chip PSD is determined by potential barrier between Mo
and n-Si (ND = 3x1015 cm-3). Forward voltage UF = 208 mV and temperature
coefficient TC = -1.635 mV/C (with linearity kT <0.4% for temperature range of
-65 to +85 C) at supply current IF = 1 mA is achieved. The reverse I-V
characteristic has high breakdown voltage UBR > 85 V and low leakage current IL
< 5 {\mu}A at 25 C and IL < 130 {\mu}A at 85 C (UR = 20 V) because chip PSD
contains the structure of two p-type guard rings along the anode perimeter. The
application of PSD chip for wider temperature range from -65 to +115 C is
proved. The separate chip PSD of temperature sensor located at a distance of
less than 1.5 mm from the pressure sensor chip. The PSD chip transmits input
data for temperature compensation of pressure sensor errors by ASIC and for
direct temperature measurement.
