  Optical tweezer arrays of laser-cooled and individual controlled particles
have revolutionized the atomic, molecular and optical physics, and they afford
exquisite capabilities for applications in quantum simulation of many-body
physics, quantum computation and quantum sensing. Underlying this development
is the technical maturity of generating scalable optical beams, enabled by
active components and high numerical aperture objective. However, such a
complex combination of bulk optics outside the vacuum chamber is very sensitive
to any vibration and drift. Here we demonstrate the generation of 3*3 static
tweezer array with a single chip-scale multifunctional metasurface element in
vacuum, replacing the meter-long free space optics. Fluorescence counts on the
camera validates the successfully trapping of the atomic ensemble array.
Further, we discuss the strategy to achieve low scattering and crosstalk, where
a metasurface design featuring dual-wavelength independent control is included.
Our results, together with other recent development in integrated photonics for
cold atoms, could pave the way for compact and portable quantum sensors and
simulators in platforms of neutral atom arrays.
