  In the framework of the GLARE-X (Geodesy via LAser Ranging from spacE X)
project, led by INFN and funded for the years 2019-2021, aiming at
significantly advance space geodesy, one shows the initial activities carried
out in 2019 in order to manufacture and test adaptive mirrors. This specific
article deals with manufacturing and surface quality measurements of the
passive substrate of 'candidate' MEMS (Micro-Electro-Mechanical Systems)
mirrors for MRRs (Modulated RetroReflectors); further publications will show
the active components. The project GLARE-X was approved by INFN for the years
2019-2021: it involves several institutions, including, amongst the other,
INFN-LNF and FBK. GLARE-X is an innovative R&D activity, whose at large space
geodesy goals will concern the following topics: inverse laser ranging (from a
laser terminal in space down to a target on a planet), laser ranging for debris
removal and iterative orbit correction, development of high-end ToF (Time of
Flight) electronics, manufacturing and testing of MRRs for space, and provision
of microreflectors for future NEO (Near Earth Orbit) cubesats. This specific
article summarizes the manufacturing and surface quality measurements
activities performed on the passive substrate of 'candidate' MEMS mirrors,
which will be in turn arranged into MRRs. The final active components, to be
realized by 2021, will inherit the manufacturing characteristics chosen thanks
to the presented (and further) testing campaigns, and will find suitable space
application to NEO, Moon, and Mars devices, like, for example, cooperative and
active lidar scatterers for laser altimetry and lasercomm support.
