  The essence of the method of transformation of ion-plasma streams was
disclosed. A phenomenological model of binary alloy films formation was
suggested, in the case of a conducting target being sputtered by ions of
nongaseous substances. By example of Nb films formation and Nb-Sn system, the
effect of kinetic and thermodynamic parameters on the formation processes of
mono- and bi-component films, in the framework of the used method, were
studied. The range of energies of condensing particles, within which form
highly stable mono-component films and coatings, was specified. The mechanisms
of condensation-induced and radiation-induced diffusion were compared,
indicating the energy ranges, which determine a predominant implementation of
the vacancy or interstitial mechanism of condensation-induced diffusion.
