  Dispersion-based graphene materials are promising candidates for various
sensing applications. They offer the advantage of relatively simple and fast
deposition via spin-coating, Langmuir-Blodgett deposition, or inkjet printing.
Film uniformity and reproducibility remain challenging in all of these
deposition methods. Here, we demonstrate, characterize, and successfully apply
a scalable structuring method for graphene dispersions. The method is based on
a standard lift-off process, is simple to implement, and increases the film
uniformity of graphene devices. It is also compatible with standard
semiconductor manufacturing methods. We investigate two different graphene
dispersions via Raman spectroscopy and Atomic Force Microscopy and observe no
degradation of the material properties by the structuring process. Furthermore,
we achieve high uniformity of the structured patterns and homogeneous graphene
flake distribution. Electrical characterizations show reproducible sheet
resistance values correlating with material quantity and uniformity. Finally,
repeatable humidity sensing is demonstrated with van der Pauw devices, with
sensing limits of less than 1% relative humidity.
