  Recent scientific and technological advances have enabled the detection of
gravitational waves, autonomous driving, and the proposal of a communications
network on the Moon (Lunar Internet or LunaNet). These efforts are based on the
measurement of minute displacements and correspondingly the forces or fields
transduction, which translate to acceleration, velocity, and position
determination for navigation. State-of-the-art accelerometers use capacitive or
piezo resistive techniques, and micro-electromechanical systems (MEMS) via
integrated circuit (IC) technologies in order to drive the transducer and
convert its output for electric readout. In recent years, laser optomechanical
transduction and readout have enabled highly sensitive detection of motional
displacement. Here we further examine the theoretical framework for the novel
mechanical frequency readout technique of optomechanical transduction when the
sensor is driven into oscillation mode [8]. We demonstrate theoretical and
physical agreement and characterize the most relevant performance parameters
with a device with 1.5mg/Hz acceleration sensitivity, a 2.5 fm/Hz1/2
displacement resolution corresponding to a 17.02 ug/Hz1/2 force-equivalent
acceleration, and a 5.91 Hz/nW power sensitivity, at the thermodynamical
limits. In addition, we present a novel technique for dynamic range extension
while maintaining the precision sensing sensitivity. Our inertial accelerometer
is integrated on-chip, and enabled for packaging, with a laser-detuning-enabled
approach.
