  The effect of short-time and long-time annealing at 250C on the conductivity,
hole density, and Curie temperature of GaMnAs single layers and GaMnAs/InGaMnAs
heterostructures is studied by in-situ conductivity measurements as well as
Raman and SQUID measurements before and after annealing. Whereas the
conductivity monotonously increases with increasing annealing time, the hole
density and the Curie temperature show a saturation after annealing for 30
minutes. The incorporation of thin InGaMnAs layers drastically enhances the
Curie temperature of the GaMnAs layers.
