  The implementation of on-chip MEMS/NEMS transducers for arbitrary resonators
is difficult due to a number of difficulties such as material choice, large
dissipation, restriction in high frequency, low sensitivity, poor reliability,
and poor integrability. We show a universal on-chip transduction scheme, which
can be adapted to any MEMS/NEMS resonator. We achieve all electrical, on-chip
MEMS/NEMS for any resonator.
