  In this work We report on the extensive characterization of amorphous silicon
carbide (a-SiC) coatings prepared by physical deposition methods. We compare
the results obtained on two different sputtering systems (a standard RF
magnetron sputtering and a ion-beam assisted sputtering) to seize the impact of
two different setups on the repeatably of the results.
  After a thorough characterization of structural, morphological, and
compositional characteristics of the prepared samples, we focus on a detailed
study of the optical and mechanical losses in those materials. Mechanical
losses are further investigated from a microscopic point of view by comparing
our experimental results with molecular dynamic simulations of the amorphous
SiC structure: first we define a protocol to generate a numerical model of the
amorphous film, capturing the main features of the real system; then we
simulate its dynamical behaviour upon deformation in order to obtain its
mechanical response. Our results are discussed within the perspective
application of a-SiC as an optical material for high-precision optical
experiments and in particular in gravitational wave interferometry.
