  Atomic probe tomography (APT), based on the work of Erwin Mueller, is able to
generate three-dimensional chemical maps in atomic resolution. The required
instruments for APT have evolved over the last 20 years from an experimental to
an established method of materials analysis. Here, we describe the realization
of a new instrument concept that allows the direct attachment of APT to a dual
beam SEM microscope with the main achievement of fast and direct sample
transfer. New operational modes are enabled regarding sample geometry,
alignment of tips and microelectrode. The instrument is optimized to handle
cryo-samples at all stages of preparation and storage. The instrument comes
with its own software for evaluation and reconstruction. The performance in
terms of mass resolution, aperture angle, and detection efficiency is
demonstrated with a few application examples.
