  Prototyping of van der Waals materials on dense nanophotonic devices requires
high-precision monolayer discrimination to avoid bulk material contamination.
We use the glass transition temperature of polycarbonate, used in the standard
dry transfer process, to draw an in situ point for the precise pickup of two
dimensional materials. We transfer transition metal dichalcogenide monolayers
onto a large-area silicon nitride spiral waveguide and silicon nitride ring
resonators to demonstrate the high-precision contamination-free nature of the
modified dry transfer method. Our improved local transfer technique is a
necessary step for the deterministic integration of high-quality van der Waals
materials onto nanocavities for the exploration of few-photon nonlinear optics
on a high-throughput, nanofabrication-compatible platform.
