  Between 2025 and 2027, some essential components of the CMS (Compact Muon
Solenoid) detector - most notably the tracker and the calorimeter endcap - will
be upgraded to prepare for HL-LHC (High Luminosity Large Hadron Collider)
conditions. The upgraded CMS Outer Tracker and parts of the new CMS High
Granularity Calorimeter (HGCAL) will encompass over $50{,}000$ new silicon
sensors covering a total area of about $800\,\text{m}^{2}$. The sensor series
production requires a dedicated strategy to monitor the quality and stability
of the production process. The strategy is based on a test structure set that
provides quick and easy access to critical process parameters. These include
parameters not directly accessible on the sensors (e.g. oxide charge
concentration and interface trap density) and parameters requiring potentially
destructive measurements (e.g. dielectric strength). The set is implemented at
least twice on each production wafer. It is divided into test structures for
initial evaluation of the most relevant process parameters and structures for
in-depth analysis. All structures can be contacted using a 20-needle probe card
and an automated positioning stage. With this system, the initial analysis of
one wafer is possible in about 30 minutes. In this paper, the CMS collaboration
presents the quality assurance plan for the Phase-2 Upgrade with a focus on
process quality control. We cover sensor process specifics, the layout of the
test structure set that will be implemented in the production runs for the CMS
Outer Tracker and HGCAL, and measurement results illustrating the functionality
of the included test structures.
