  We report on the development of multi-beam RF linear ion accelerators that
are formed from stacks of low cost wafers and describe the status of beam power
scale-up using an array of 120 beams. The total argon ion current extracted
from the 120-beamlet extraction column was 0.5 mA. The measured energy gain in
each RF gap reached as high as 7.25 keV. We present a path of using this
technology to achieve ion currents >1 mA and ion energies >100 keV for
applications in materials processing.
