  We report on mapping of the local density of states in L3 photonic crystal
resonators (PCR) via deterministically positioned single Ge quantum dots (QDs).
Perfect site-control of Ge QDs on pre-patterned silicon-on-insulator substrates
was exploited to fabricate in one processing run almost 300 L3 PCRs containing
single QDs in systematically varying positions in the cavities. The alignment
precision of the QD emitters was better than 20 nm. This type of parallel
processing is essentially based on standard Si device technologies and is
therefore scalable to any number and configuration of PCR structures. As a
first demonstrator, we probed the coupling efficiency of a single Ge QD to the
L3 cavity modes as a function of their spatial overlap. The results are in very
good agreement with finite-difference time-domain simulations.
