  Magnetic field (B) distribution of the magnetron was measured and discussed
its effect on plasma parameters and deposition rate. Plasma parameters such as
electron temperature (Te), electron number density (ne) were estimated using
electron flux (EF) and electron energy distribution function (EEDF) methods as
function of axial, radial distances from the cathode. Te and ne decreased with
increasing of axial, radial distances from the cathode. Dr was obtained for the
same positions where the above plasma parameters were measured, and found that
similar profile with Te and ne. Magnetron configuration was simulated using
COMSOL Multiphysics software and compared with the experimentally measured
profile. Further, density distribution was simulated using measured B through
particle in cell - Monte Carlo collision and found simulation results are well
supported to the experimental results.
