  We present a comprehensive structural characterization of ferromagnetic SiC
single crystals induced by Ne ion irradiation. The ferromagnetism has been
confirmed by electron spin resonance and possible transition metal impurities
can be excluded to be the origin of the observed ferromagnetism. Using X-ray
diffraction and Rutherford backscattering/channeling spectroscopy, we estimate
the damage to the crystallinity of SiC which mutually influences the
ferromagnetism in SiC.
