  We present the application of an evolutionary genetic algorithm for the
in-situ optimization of nanostructures prepared by focused
electron-beam-induced deposition. It allows us to tune the properties of the
deposits towards highest conductivity by using the time gradient of the
measured in-situ rate of change of conductance as fitness parameter for the
algorithm. The effectiveness of the procedure is presented for the precursor
W(CO)6 as well as for post-treatment of Pt-C deposits obtained by dissociation
of MeCpPt(Me)3. For W(CO)6-based structures an increase of conductivity by one
order of magnitude can be achieved, whereas the effect for MeCpPt(Me)3 is
largely suppressed. The presented technique can be applied to all beam-induced
deposition processes and has great potential for further optimization or tuning
of parameters for nanostrucures prepared by FEBID or related techniques.
