  This work highlights the possibility of improving the quantification aspect
of Cs-complex ions in SIMS (Secondary Ion Mass Spectrometry), by combining the
intensities of all possible Cs-complexes. Identification of all possible
Cs-complexes requires quantitative analysis of mass spectrum from the material
of interest. The important steps of this mass spectral analysis include
constructing fingerprint mass spectra of the constituent species from the table
of isotopic abundances of elements, constructing the system(s) of linear
equations to get the intensities of those species, solving them, evaluating the
solutions and employing a regularization process when required. These steps are
comprehensively described and the results of their application on a SIMS mass
spectrum obtained from D9 steel are presented. It is demonstrated that results
from the summation procedure, which covers entire range of sputtered clusters,
is superior to results from single Cs-complex per element. The result of
employing a regularization process in solving a mass spectrum from an SS316LN
steel specimen is provided to demonstrate the necessity of regularization.
