  Iterative Monte Carlo algorithm has been constructed and tested for
quantification of X-ray fluorescence analysis in order to determine the atomic
composition of solid materials. The calculation model uses simulation code
MCNP6 that describes the excitation and relaxation phenomenon in the atomic
electron shell. The complete analytical procedure was tested by quantitative
analysis of standard reference alloy materials. Acceptable agreement was found
between the calculated and nominal concentrations within the standard
deviations of the concentrations of the major elements. The total duration of
the repeatedly performed Monte Carlo numerical computation for the entire
analysis was only a few minutes, due to the application of variance reduction
procedures available in the Monte Carlo code. A frame software was designed and
written in MatLab programming environment for controlling the iterative
calculation of the elementary composition of the sample material.
