  We present the design and fabrication of a miniaturized array of
piezoelectrically actuated high speed Fresnel mirrors with individual mirror
control. These Fresnel mirrors can be used to generate propagation invariant
and self-healing interference patterns. The mirrors are actuated using
piezobimorph actuators, and the consequent change of the tilting angle of the
mirrors changes the fringe spacing of the interference pattern generated. The
array consists of four Fresnel mirrors each having an area of 2x2 mm2 arranged
in a 2x2 configuration. The device, optimized using FEM simulations, is able to
achieve maximum mirror deflections of 15 mrad, and has a resonance frequency of
28 kHz.
