  The Ni(CO)4, Cr(CO)6, Co(CO)3NO are some of the most common precursors used
for the focused electron-induced deposition. Some of the compounds, even though
extensively used have high requirements when it comes to handling, being
explosives, highly flammable, and with high toxicity levels, as is the case of
Ni(CO)4. We are employing simulations to determine values that are hard to
determine experimentally, and compare them with DFT calculations and
experimental data where available. Using Quantemol-N cross-sections simulations
for dissociative electron attachment (DEA) at low electron energy, 0 - 20eV,
gives valuable information on the fragmentation of the molecules, using their
bond dissociation energies, electron affinities, and incident electron
energies. The values obtained for the cross-sections are 0.12x10-18cm2 for
Ni(CO)4, 4.5x10-16cm2 for Co(CO)3NO DEA cross-sections and 4.3x10-15cm2for
Cr(CO)6.
