  The lateral resolution of an X-ray photoelectron spectroscopy instrument,
which is equipped with a focused X-ray beam, is limited by the nominal X-ray
beam diameter and the long tail intensity distri-bution of the X-ray beam. The
long tail intensity distribution of the X-ray beam impedes to perform a
measurement with good lateral resolution and low detection limits at the same
time. Two experimental setups are described which allow examining sample
structures that are smaller than the X-ray beam dimensions. The first method
uses differential sample charging on partly non-conductive samples by low
energy electron flooding. The spectra of the non-conductive sample areas are
shifted towards lower binding energy. That way, the surface compositions of
conductive and non-conductive sample areas are estimated independently. The
second method utilizes the rather limited dimensions of the energy analyser
acceptance volume. Here only the sample is placed inside the energy analyser
acceptance volume. That way, signals from the illuminated sample contribute
exclusively to the measured photoelectrons intensity, independent form the
sample size.
