  A novel laser molecular beam epitaxy (LMBE) system for the fabrication of
atomically controlled oxides superlattices and an x-ray diffractometer that
measures spatially-resolved x-ray diffraction spectra have been developed based
on the concept of combinatorial methodology. The LMBE chamber has two moving
masks, an automated target stage, a substrate heating laser, and an in-situ
scanning reflection high-energy electron diffraction system. The x-ray
diffractometer with a curved monochromator and two-dimensional detector is used
for rapid concurrent x-ray diffraction intensity mapping with the two axes of
the detector corresponding to the diffraction angle and a position in the
sample.
