  The paper provides a tutorial to the conceptual layout of a self-consistently
coupled Particle-In-Cell/Test-Particle model for the kinetic simulation of
sputtering transport in capacitively coupled plasmas at low gas pressures. It
explains when a kinetic approach is actually needed and which numerical
concepts allow for the inherent nonequilibrium behavior of the charged and
neutral particles. At the example of a generic sputtering discharge both the
fundamentals of the applied Monte Carlo methods as well as the conceptual
details in the context of the sputtering scenario are elaborated on. Finally,
two in the context of sputtering transport simulations often exploited
assumptions, namely on the energy distribution of impinging ions as well as on
the test particle approach, are validated for the proposed example discharge.
