  Test beam results obtained with 3D pixel sensors bump-bonded to the RD53A
prototype readout ASIC are reported. Sensors from FBK (Italy) and IMB-CNM
(Spain) have been tested before and after proton-irradiation to an equivalent
fluence of about $1$ $\times$ $10^{16}$ $\text{n}_{\text{eq}}$ cm$^{-2}$ (1 MeV
equivalent neutrons). This is the first time that one single collecting
electrode fine pitch 3D sensors are irradiated up to such fluence bump-bonded
to a fine pitch ASIC. The preliminary analysis of the collected data shows no
degradation on the hit detection efficiencies of the tested sensors after high
energy proton irradiation, demonstrating the excellent radiation tolerance of
the 3D pixel sensors. Thus, they will be excellent candidates for the extreme
radiation environment at the innermost layers of the HL-LHC experiments.
