  The flourishing field of two-dimensional (2D) nanophotonics has generated
much excitement in the quantum technologies community after the identification
of quantum emitters (QEs) in layered materials (LMs). LMs offer many advantages
as platforms for quantum circuits, such as integration within hybrid
technologies, valley degree of freedom and strong spin-orbit coupling. QEs in
LMs, however, suffer from uncontrolled occurrences, added to the uncertainty
over their origin, which has been linked to defects and strain gradients. Here,
we report a scalable method to create arrays of single-photon emitting QEs in
tungsten diselenide (WSe2) and tungsten disulphide (WS2) using a nanopatterned
silica substrate. We obtain devices with QE numbers in the range of hundreds,
limited only by the flake size, and a QE yield approaching unity. The overall
quality of these deterministic QEs surpasses that of their randomly appearing
counterparts, with spectral wanderings of around 0.1 meV, an order of magnitude
lower than previous reports. Our technique solves the scalability challenge for
LM-based quantum photonic devices.
