  The Scanning electron microscope (SEM) and Electron-Dispersive Spectroscope
(EDS) are two highly effective instruments in the field of nanoscience and
nanotechnology. The quality of these instruments is determined by various
factors, with high resolution being a crucial one. To determine the practically
achievable resolution of the SEM, reference materials such as gold particles on
carbon substrate are commonly utilized. On the other hand, high demanding, and
usual materials such as brass, aluminum oxide or MEMs are of high importance to
be considered in the way of improving material characterization. In this study
five different samples were analyzed in four steps to see the effect of
astigmatism and aperture misalignment, the mirror effect on the charged
uncoated sample in backscattered electron (BSE) and secondary electron (SE)
images, compositional and topographical analysis using both qualitative and
quantitative methods and finally apply all the steps on a
micro-electromechanical system (MEMS) device. This study illustrates the
possibility of controlling the mirror effect by adjusting the input parameters
even in the cases that the user needs to have low accelerating voltage for the
experiment. Besides, the discussion addresses possible reasons for the absence
of some peaks in EDS analysis for some specific elements.
