  Microwave and radio frequency driven plasmas jets play an important role in
many technical applications. They are usually operated in a capacitive mode
known as E-mode. As a new plasma source the MMWICP (Miniature Micro Wave ICP)
has been proposed, a small scale plasma jet with inductive coupling based on a
specially designed resonator that acts as an LC-resonance circuit. This work
presents a theoretical model of the new device, based on a series
representation of the electromagnetic field in the resonator and the volume
integrated (global) model for the loss processes within the plasma. An infinite
number of modes can be found ordered by the azimuthal wave number m. These
modes essentially determine the electromagnetic behavior of the system and
differ from ordinary cavity modes. The mode m=0 can be identified with the
inductive mode and is called H-mode, the mode m=1 is the capacitive mode and is
called E-mode. Both modes refer to different operating regimes, which are
separated by different values of the plasma parameters. In a second step the
matching network and its characteristics are taken into account in order to
find stable equilibrium points and possible hysteresis effects. As main result,
the feasibility of inductive power coupling for the MMWICP resonator is shown.
