  We have studied the depth-dependent magnetic and structural properties of
as-grown and optimally annealed Ga[1-x]Mn[x]As films using polarized neutron
reflectometry. In addition to increasing total magnetization, the annealing
process was observed to produce a significantly more homogeneous distribution
of the magnetization. This difference in the films is attributed to the
redistribution of Mn at interstitial sites during the annealing process. Also,
we have seen evidence of significant magnetization depletion at the surface of
both as-grown and annealed films.
