  In this work, the one-dimensional implicit particle-in-cell/Monte-Carlo
collision code (PIC/MCC) is used to study the discharge of a capacitively
coupled plasma (CCP) under extremely low pressure driven by high-frequency rf
power in pure argon. With the introduction of high-coefficient electron-induced
secondary electron emission (ESEE) and a blocking capacitor, the discharge that
cannot be sustained shows a variety of different characteristics: including the
normal failure discharge (NFD) of the electron avalanche, bias failure
discharge caused by the charging effect of the blocking capacitor, and runaway
failure discharge caused by the decrease in the ESEE rate during the forming of
the sheath. The discharges in low-pressure regions exhibit a range of discharge
characteristics, the sustainable discharges of which have been analyzed in more
detail. The study of unsustainable discharge helps to find the reasons for
failure discharge and then determine the parameters of sustainable discharge,
which is of great value in preventing plasma crack, equipment product yield,
and equipment safety to help prevent industrial losses.
