  Microplasmas are operated around atmospheric pressure exhibiting pronounced
non-equilibrium characteristics, i.e. they possess energetic electrons while
ions and neutrals remain cold. They have gained significant interest due to
their enormous application potential e.g. in the biomedical, surface
modification and light source areas, just to name a few. Many different
configurations are in use. Their understanding and quantification is mandatory
for further progress in applications. We report on recent progress in the
diagnostics and simulation of the entire microplasma system from gas
introduction, via the plasma discharge up to the samples at the example of a
plasma jet operated in He/O2 in an ambient air environment.
