  Laterally periodic nanostructures were investigated with grazing incidence
small angle X-ray scattering. To support an improved reconstruction of
nanostructured surface geometries, we investigated the origin of the
contributions to the diffuse scattering pattern which is correlated to the
surface roughness. Resonant diffuse scattering leads to a palm-like structure
of intensity sheets. Dynamic scattering generates the so-called Yoneda band
caused by a resonant scatter enhancement at the critical angle of total
reflection and higher-order Yoneda bands originating from a subsequent
diffraction of the Yoneda enhanced scattering at the grating. Our explanations
are supported by modelling using a solver for the time-harmonic Maxwell's
equations based on the finite-element method.
