  A novel approach is proposed, where energy filtered electrons, carrying both
chemical identity and electrical information, serve as fine and flexible
electrodes in direct electrical measurements. The method, termed 'chemically
resolved electrical measurements' (CREM), is simple and general, demonstrated
here with a slightly modified X-ray photoelectron spectrometer. Selected
sub-surface regions are electrically analyzed and I-V curves of self-assembled
monolayers, free of substrate and top contact contributions, are derived with
no need for improved metallic substrates. Unique electrical information is
available with this method, further supported by powerful in-situ analytical
capabilities and improved top contact performance.
