  Scanning transmission electron microscopy in combination with electron
energy-loss spectroscopy is used to study LaNiO3/LaAlO3 superlattices grown on
(La,Sr)AlO4 with varying single-layer thicknesses which are known to control
their electronic properties. The microstructure of the films is investigated on
the atomic level and the role of observed defects is discussed in the context
of the different properties. Two types of Ruddlesden-Popper faults are found
which are either two or three dimensional. The common planar Ruddlesden-Popper
fault is induced by steps on the substrate surface. In contrast, the
three-dimensionally arranged Ruddlesden-Popper fault, whose size is in the
nanometer range, is caused by the formation of local stacking faults during
film growth. Furthermore, the interfaces of the superlattices are found to show
different sharpness, but the microstructure does not depend substantially on
the single-layer thickness.
