  Several active areas of research in novel energy storage technologies,
including three-dimensional solid state batteries and passivation coatings for
reactive battery electrode components, require conformal solid state
electrolytes. We describe an atomic layer deposition (ALD) process for a member
of the lithium phosphorus oxynitride (LiPON) family, which is employed as a
thin film lithium-conducting solid electrolyte. The reaction between lithium
tert-butoxide (LiO$^t$Bu) and diethyl phosphoramidate (DEPA) produces
conformal, ionically conductive thin films with a stoichiometry close to
Li$_2$PO$_2$N between 250 and 300$^\circ$C. The P/N ratio of the films is
always 1, indicative of a particular polymorph of LiPON which closely resembles
a polyphosphazene. Films grown at 300$^\circ$C have an ionic conductivity of
$6.51\:(\pm0.36)\times10^{-7}$ S/cm at 35$^\circ$C, and are functionally
electrochemically stable in the window from 0 to 5.3V vs. Li/Li$^+$. We
demonstrate the viability of the ALD-grown electrolyte by integrating it into
full solid state batteries, including thin film devices using LiCoO$_2$ as the
cathode and Si as the anode operating at up to 1 mA/cm$^2$. The high quality of
the ALD growth process allows pinhole-free deposition even on rough crystalline
surfaces, and we demonstrate the fabrication and operation of thin film
batteries with the thinnest (<100nm) solid state electrolytes yet reported.
Finally, we show an additional application of the moderate-temperature ALD
process by demonstrating a flexible solid state battery fabricated on a polymer
substrate.
