  We provide insights into the influence of surface termination on the oxygen
vacancy incorporation for the perovskite model material SrTiO3 during annealing
in reducing gas environments. We present a novel approach to control to tailor
the oxygen vacancy formation by controlling the termination. We prove that a
SrO-termination can inhibit the incorporation of oxygen vacancies across the
(100)-surface and apply this to control their incorporation during thin film
growth. Utilizing the conducting interface between LaAlO3 and SrTiO3, we could
tailor the oxygen-vacancy based conductivity contribution by the level of SrO
termination at the interface.
