  The presumably unconventional superconductor Beta-FeSe was deposited by radio
frequency sputtering and molecular beam epitaxy (MBE) from two elementary
sources. Superconducting thin films were grown in (001)-orientation on MgO(100)
and YAlO3(010) substrates. The morphology of the samples was studied and
directly related to the superconducting properties of the Beta-FeSe thin films.
The MBE grown thin films show microcracks down to the substrate and a roughness
of about 100~nm. In contrast, sputter deposited superconducting thin films show
a smooth surface with almost no precipitates. In both cases resistive
superconducting transitions with critical temperature up to 8.5 K were
observed. However, the smoothness of the sputter deposited films is crucial for
future surface dependent investigations.
