  We present the design and implementation of a scanning probe microscope,
which combines electrically detected magnetic resonance (EDMR) and
(photo-)conductive atomic force microscopy ((p)cAFM). The integration of a
3-loop 2-gap X-band microwave resonator into an AFM allows the use of
conductive AFM tips as a movable contact for EDMR experiments. The optical
readout of the AFM cantilever is based on an infrared laser to avoid
disturbances of current measurements by absorption of straylight of the
detection laser. Using amorphous silicon thin film samples with varying defect
densities, the capability to detect a spatial EDMR contrast is demonstrated.
Resonant current changes as low as 20 fA can be detected, allowing the method
to realize a spin sensitivity of 8*10^6 spins/Hz^0.5 at room temperature.
