  Transmission electron microscopy has become a major characterisation tool
with an ever increasing variety of methods being applied in wide range of
scientific fields. However, the probably most famous pitfall in related
workflows is the preparation of high-quality electron-transparent lamellae
enabling for extraction of valuable and reliable information. Particularly in
the field of solid state physics and materials science, it is often required to
study the surface of a macroscopic specimen with plan-view orientation.
Nevertheless, despite tremendous advances in instrumentation, i.e. focused ion
beam, the yield of existing plan-view lamellae preparation techniques is
relatively low compared to cross-sectional extraction methods. Furthermore,
techniques relying on mechanical treatments, i.e. conventional preparation,
compromise site-specifity. In this paper, we demonstrate that by combining a
mechanical grinding step prior to backside lift-out in the focused ion beam
plan-view lamellae preparation becomes increasingly easy. The suggested
strategy combines site-specifity with micrometer precision as well as possible
investigation of pristine surfaces with a field of view of several hundred
square micrometers.
