  Based on the three parametric Lorenz system, a model was developed that
permits to describe the behavior of the plasma-condensate system near phase
equilibrium in a self-consistent way. Considering the effect of fluctuations of
the growth surface temperature, the evolution equation and the corresponding
Fokker-Planck equation were obtained. The phase diagram is built which
determines the system parameters corresponding to the regime of the porous
structure formation.
