  In this paper we demonstrate experimentally that crystalline phases appear in
amorphous titanium oxide upon processing with ultrafast laser pulses. Amorphous
titanium thin films were produced by plasma-enhanced chemical vapor deposition
(PECVD) and exposed to femtosecond laser pulses. Formation of rutile phase was
confirmed by X-ray diffraction, Raman measurements and electron backscattering
diffraction. A rang of processing parameters for the crystallization is
reported and possible background mechanisms are discussed.
