  We are now developing new X-ray imaging system by using Silicon-On-Insulator
(SOI) Pixel Detectors. The SOI detector is a monolithic radiation imaging
detector based on a 0.2um FD-SOI CMOS process. Special additional process steps
are also developed to create fully depleted sensing region of 50~500um thick.
SOI detector has up to mega pixels, so development of high speed Data
Acquisition (DAQ) system is very important in conducting experiments. We have
developed readout board named SEABAS2 (Soi EvAluation BoArd with Sitcp 2) for
SOI detector. The SEABAS2 board has 16 channels of 65 MSPS ADCs, 4ch DAC, FPGAs
and Gigabit Ethernet I/F. To achieve high throughput of the DAQ, we
aggressively adopt parallel processing (data taking and storing) and implement
FIFO buffers in software. DAQ throughput in previous DAQ system was 6 Hz (41
Mbps) for INTPIX4 detector which has 423 kpixels of 17 um square. With newly
developed system, we could improve this rate to 90 Hz (613 Mbps). To take X-ray
images for practical purpose such as 3D CT, user have to control the peripheral
devices (moving stage, beam shutter, monitoring devices etc.) while taking
images. To ease such data taking, we also implemented automatic control
function of peripheral devices. Introduction of SOI detectors, the detail of
the DAQ system and experimental results are presented.
