  Gold micro-mirrors have been formed in silicon in an inverted pyramidal
shape. The pyramidal structures are created in the (100) surface of a silicon
wafer by anisotropic etching in potassium hydroxide. High quality micro-mirrors
are then formed by sputtering gold onto the smooth silicon (111) faces of the
pyramids. These mirrors show great promise as high quality optical devices
suitable for integration into MOEMS systems.
