  To understand the chemical reaction at the interface of materials, we
performed a transmission electron microscopy (TEM) observation in four types of
Fe(Te,Se) superconducting thin films prepared on different types of substrates:
CaF2 substrate, CaF2 substrate with a CaF2 buffer layer, CaF2 substrate with a
FeSe buffer layer, and a LaAlO3 substrate with a CaF2 buffer layer. Based on
the energy-dispersive X-ray spectrometer (EDX) analysis, we found possible
interdiffusion between fluorine and selenium that has a strong influence on the
superconductivity in Fe(Te,Se) films. The chemical interdiffusion also plays a
significant role in the variation of the lattice parameters. The lattice
parameters of the Fe(Te,Se) thin films are primarily determined by the chemical
substitution of anions, and the lattice mismatch only plays a secondary role.
