  Repeatable and reliable site-specific preparation of specimens for atom probe
tomography (APT) at cryogenic temperatures has proven challenging. A
generalized workflow is required for cryogenic-specimen preparation including
lift-out via focused-ion beam and in-situ deposition of capping layers, to
strengthen specimens that will be exposed to high electric field and stresses
during field evaporation in APT, and protect them from environment during
transfer into the atom probe. Here, we build on existing protocols, and
showcase preparation and analysis of a variety of metals, oxides and supported
frozen liquids and battery materials. We demonstrate reliable in-situ
deposition of a metallic capping layer that significantly improve the atom
probe data quality for challenging material systems, particularly battery
cathode materials which are subjected to delithiation during the atom probe
analysis itself. Our workflow designed is versatile and transferable widely to
other instruments.
