  Efficient multilayer optics for radiation in the water window range are
difficult to manufacture due to extremely small layer thicknesses and severe
intermixing of elements between the layers. Therefore, adequate analytics and
short feedback loops are of utmost importance for manufacturers to improve
performance and efficiency. We show the possibility for non-destructive
elemental depth profiling with commercial laboratory equipment using four
real-life CrSc multilayer samples. Comparative measurements at the laboratory
of PTB at the synchrotron radiation facility BESSY II confirm the results and
prove the potential of laboratory equipment for the reliable analysis of
stratified materials with sub-nanometer layer thicknesses.
