  The necessary and sufficient condition for the piezoresistance coefficient
extraction and conditioning of the extraction problem are considered as a
problem of the certain matrix A. This matrix is implied by the stress
distribution on the certain test structure. For the given test structure matrix
A was calculated and the condition number was estimated. Obtained value of
condition number shows that proposed test structure gives well-conditioned
matrix A. Both the geometrical analysis and numerical estimation of condition
number shows that the problem of extraction is well-conditioned and the test
structure is properly designed. For the given condition number the error
propagation of the input data was considered. For assumed levels of the input
data errors, the relative error of piezoresistance coefficient is less than 8%.
