  In this paper, a capacitive flexible tactile sensor was designed to measure
the pressure of objects based on MEMS technology. This sensor is a structure of
a 4x4 array, with metal Ag as the capacitive electrode, which forms the tactile
sensing unit of the sensor. The structure of capacitive flexible tactile sensor
was designed and an experimental platform was established to test the
performance. The tests show that when the thickness of the intermediate layer
is 2 mm and the density is medium, the sensor's sensitivity is the best while
the time of both the response and the rebound is fast.
