  We study the precession frequency and effective damping of patterned
permalloy thin films of different geometry using integrated inductive test
structures. The test structures consist of coplanar wave guides fabricated onto
patterned permalloy stripes of different geometry. The width, length and
position of the permalloy stripe with respect to the center conductor of the
wave guide are varied. The precession frequency and effective damping of the
different devices is derived by inductive measurements in time and frequency
domain in in-plane magnetic fields. While the precession frequencies do not
reveal a significant dependence on the sample geometry we find a decrease of
the measured damping with increasing width of the permalloy centered underneath
the center conductor of the coplanar wave guide. We attribute this effect to an
additional damping contribution due to inhomogeneous line broadening at the
edges of the permalloy stripes which does not contribute to the inductive
signal provided the permalloy stripe is wider than the center conductor.
Consequences for inductive determination of the effective damping using such
integrated reference samples are discussed.
