  We apply the superconducting proximity effect in TiN/Ti multi-layer films to
tune the critical temperature, Tc, to within 10 mK with high uniformity (less
than 15 mK spread) across a 75 mm wafer. Reproducible Tc's are obtained from
0.8 - 2.5 K. These films had high resistivities, > 100 uOhm-cm and internal
quality factors for resonators in the GHz range on the order of 100k and
higher. Both trilayers of TiN/Ti/TiN and thicker superlattice films were
prepared, demonstrating a highly controlled process for films over a wide
thickness range. Detectors were fabricated and showed single photon resolution
at 1550 nm. The high uniformity and controllability coupled with the high
quality factor, kinetic inductance, and inertness of TiN make these films ideal
for use in frequency multiplexed kinetic inductance detectors and other
potential applications such as nanowire detectors, transition edge sensors and
associated quantum information applications.
