  We demonstrate the fabrication of individual nanopores in hexagonal boron
nitride (hBN) with atomically precise control of the pore size. Previous
methods of pore production in other 2D materials create pores of irregular
geometry with imprecise diameters. By taking advantage of the preferential
growth of boron vacancies in hBN under electron beam irradiation, we are able
to observe the pore growth via transmission electron microscopy, and terminate
the process when the pore has reached its desired size. Careful control of beam
conditions allows us to nucleate and grow individual triangular and hexagonal
pores with diameters ranging from subnanometer to 6nm over a large area of
suspended hBN using a conventional TEM. These nanopores could find application
in molecular sensing, DNA sequencing, water desalination, and molecular
separation. Furthermore, the chemical edge-groups along the hBN pores can be
made entirely nitrogen terminated or faceted with boron-terminated edges,
opening avenues for tailored functionalization and extending the applications
of these hBN nanopores.
