  We discuss a concept of a point-like source of the extreme ultraviolet (EUV)
light based on a non-equilibrium microwave discharge in expanding jet of dense
xenon plasma with multiply charged ions. A conversion efficiency of microwave
radiation to EUV light is calculated, and physical constraints, and
opportunities for future devices are considered. Special attention is given to
trapping of spontaneous line emission inside a radiating plasma spot that
significantly influences the efficiency of EUV light source.
