  Extreme ultraviolet (EUV) induced pulsed plasma is unique due to its
transient characteristics: the plasma switches between non-thermal state (when
EUV power is ON at the beginning of the pulse) and thermal state (end of the
pulse at ~ 20 us). It is shown that although electron drag force acting on nm
size particles in hydrogen plasma is negligible compared to the ion drag force
at the beginning of the pulse, however it can be dominant at the end of the
pulse and can play important role in particle transport leading to defectivity
issues for semiconductor chip production technologies.
