  Non-ionising energy loss of radiation produces point defects and defect
clusters in silicon, which result in a signifcant degradation of sensor
performance. In this contribution results from TSC (Thermally Stimulated
Current) defect spectroscopy for silicon pad diodes irradiated by electrons to
fluences of a few $10^{14}$ cm$^{-2}$ and energies between 3.5 and 27 MeV for
isochronal annealing between 80 and 280{\deg}C, are presented. A method based
on SRH (Shockley-Read-Hall) statistics is introduced, which assumes that the
ionisation energy of the defects in a cluster depends on the fraction of
occupied traps. The dfference of ionisation energy of an isolated point defect
and a fully occupied cluster, $\Delta E_a$, is extracted from the TSC data.
  For the VOi (vacancy-oxygen interstitial) defect $\Delta E_a = 0$ is found,
which cofirms that it is a point defect, and validates the method for point
defects. For clusters made of deep acceptors the $\Delta E_a$ values for
different defects are determined after annealing at 80{\deg}C as a function of
electron energy, and for the irradiation with 15 MeV electrons as a function of
annealing temperature. For the irradiation with 3.5 MeV electrons the value
$\Delta E_a = 0$ is found, whereas for the electron energies of 6 to 27 MeV
$\Delta E_a > 0$. This agrees with the expected threshold of about 5 MeV for
cluster formation by electrons. The $\Delta E_a$ values determined as a
function of annealing temperature show that the annealing rate is different for
different defects. A naive diffusion model is used to estimate the temperature
dependencies of the diffusion of the defects in the clusters.
