  We have studied the surface modifications as well as the surface roughness of
the InP(111) surfaces after 1.5 MeV Sb ion implantations. Scanning Probe
Microscope (SPM) has been utilized to investigate the ion implanted InP(111)
surfaces. We observe the formation of nanoscale defect structures on the InP
surface. The density, height and size of the nanostructures have been
investigated here as a function of ion fluence. The rms surface roughness, of
the ion implanted InP surfaces, demonstrates two varied behaviors as a function
of Sb ion fluence. Initially, the roughness increases with increasing fluence.
However, after a critical fluence the roughness decreases with increasing
fluence. We have further applied the technique of Raman scattering to
investigate the implantation induced modifications and disorder in InP. Raman
Scattering results demonstrate that at the critical fluence, where the decrease
in surface roughness occurs, InP lattice becomes amorphous.
