  The effective electron neutrino mass measurement at the ECHo experiment
requires high purity $^{163}$Ho, which is ion implanted into detector
absorbers. To meet the project specifications in efficiency and purity, the
entire process chain of ionization, isotope separation, and implantation of
$^{163}$Ho was optimized. A new two-step resonant laser ionization scheme was
established at the $30\, kV$ magnetic mass separator RISIKO. This achieved
ionization and separation efficiencies with an average of
$69(5)_\textrm{stat}(4)_\textrm{sys}\,\%$ using intra-cavity frequency doubled
Ti:sapphire lasers. The implantation of a $^{166\textrm{m}}$Ho impurity is
suppressed about five orders of magnitude by the mass separation. A dedicated
implantation stage with focusing and scanning capability enhances the geometric
implantation efficiency into the ECHo detectors to $20(2)\,\%$.
