  Simulations and measurements on selective laser etching of display glasses
are reported. By means of a holographic 3D beam splitter, ultrashort laser
pulses are focused inside the volume of a glass sample creating type III
modifications along a specific trajectory like pearls on a string. Superimposed
by a feed of the glass sample a full 3D area of modifications is achieved
building the cornerstone for subsequent etch processes. Based on KOH the
modifications are selectively etched at a much higher rate compared to
unmodified regions resulting in a separation of the glass along the trajectory
of modifications. For gaining further insight into the etch process, we perform
simulations on this wet chemical process and compare it to our experimental
results.
