  This paper presents an optimized silicon-MEMS electromagnetic vibration
energy harvester suitable for applications such as machine health monitoring.
The harvester comprises a DRIE-etched silicon suspension, and pick-and-place
N42 NdBFe magnets and copper coils, housed in a 3D-printed package. The
harvester is designed to operate near 50 Hz with 0.5-1 g vibrations using a
long-stroke suspension. Multi-domain harvester optimization results in an
open-circuit voltage of 1.7 V, a matched-load power output of 2.2 mW, and a
matched-load power-output density of 1.23 mW/cm3 at 1.1 g with a resonance
frequency of 76.3 Hz.
