  We introduce herein the advanced application of low pressure plasma
procedures for the development of piezo and triboelectric mode I hybrid
nanogenerators. Thus, plasma assisted deposition and functionalization methods
are presented as key enabling technologies for the nanoscale design of ZnO
polycrystalline shells, the formation of conducting metallic cores in
core@shell nanowires, and for the solventless surface modification of polymeric
coatings and matrixes. We show how the perfluorinated chains grafting of PDMS
provides a reliable approach to increase the hydrophobicity and surface charges
at the same time that keeping the PDMS mechanical properties. In this way, we
produce efficient Ag/ZnO convoluted piezoelectric nanogenerators supported on
flexible substrates and embedded in PDMS compatible with a contact separation
triboelectric architecture. Factors like crystal-line texture, ZnO thickness,
nanowires aspect ratio, and surface chemical modification of the PDMS are
explored to optimize the power output of the nanogenerators aimed for
harvesting from low-frequency vibrations. Just by manual trigger-ing, the
hybrid device can charge a microcapacitor to switch on an array of color LEDs.
Outstandingly, this simple three-layer architecture allows for harvesting
vibration energy in a wide bandwidth, thus, we show the performance
characteristics for frequencies between 1 Hz to 50 Hz and demonstrate the
successful activation of the system up to ca. 800 Hz
