  Wavefront sensors are an important tool to characterize coherent beams of
extreme ultraviolet radiation. However, conventional Hartmann-type sensors do
not allow for independent wavefront characterization of different spectral
components that may be present in a beam, which limits their applicability for
intrinsically broadband high-harmonic generation (HHG) sources. Here we
introduce a wavefront sensor that measures the wavefronts of all the harmonics
in a HHG beam in a single camera exposure. By replacing the mask apertures with
transmission gratings at different orientations, we simultaneously detect
harmonic wavefronts and spectra, and obtain sensitivity to spatiotemporal
structure such as pulse front tilt as well. We demonstrate the capabilities of
the sensor through a parallel measurement of the wavefronts of 9 harmonics in a
wavelength range between 25 and 49 nm, with up to lambda/32 precision.
