  Objective of this work was to synthesize Copper doped Zinc Oxide (CZO) films
and optimization of process parameters by varying molarity of zinc acetate
dehydrate from 0.5 M to 1.0 M, concentration of copper acetate monohydrate from
1% to 5 % and annealing temperature from 200 C to 300 C to measure the
sensitivity of CZO films for CO (Carbon Monoxide) gas. The concentration of CO
gas was maintained at 5 ppm and operating temperature of 250 oC was used for
sensing. Analysis for sensitivity showed highest grading for parametric
combination of 0.75 molarity, 3% copper concentration and 300 C annealing
temperature with surface roughness of 3.90 nm and grain size of 256 nm. TEM
image revealed the crystalline grain size was 5 nm. ANOVA showed that annealing
temperature influenced the sensitivity by 69.06 % .
