  We provide a detailed description of a general procedure by which a
nano/micro-mechanical resonator can be calibrated using its thermal motion. A
brief introduction to the equations of motion for such a resonator is
presented, followed by a detailed derivation of the corresponding power
spectral density (PSD) function. The effective masses for a number of different
resonator geometries are determined using both finite element method (FEM)
modeling and analytical calculations.
