  The monolithic integration of sub-micron quartz structures on silicon
substrates is a key issue for the future development of telecommunication to
the GHz frequencies. Here we report unprecedented large-scale fabrication of
ordered arrays of piezoelectric epitaxial quartz nanostructures on silicon
substrates by the combination of soft-chemistry and three cost effective
lithographic techniques: (i) laser transfer lithography, (ii) soft nanoimprint
lithography on Sr-doped SiO2 sol-gel thin films and (iii) self-assembled SrCO3
nanoparticles reactive nanomasks. Epitaxial {\alpha}-quartz nanopillars with
different diameters (down to 50 nm) and heights (up to 2000 nm) were obtained
for the first time. This work proves the control over the shape, micro- and
nano-patterning of quartz thin films while preserving its crystallinity,
texture and piezoelectricity. This work opens up the opportunity to fabricate
new high frequency resonators and high sensitivity sensors relevant in
different fields of application.
