  The thermal stability and separation characteristic of anti-sticking layers
of Pt/Cr films were studied in this paper. Several types of adhesion layers
were investigated: 10.0 nm Pt, 1.5 nm Cr+50.0 nm Pt, 2.5 nm Cr+50.0 nm Pt and
3.5 nm Cr+50.0 nm Pt fabricated using direct current magnetron sputtering. The
variation of layer thicknesses, roughness, crystallization and surface
topography of Pt/Cr films have been analyzed by grazing incidence X-ray
reflectometry, large angle X-ray diffraction and the optical profiler before
and after heating. 2.5 nm Cr+50.0 nm Pt films exhibit the best thermal
stability and separation characteristic according to the heating and hot
slumping experiments. The films were also applied as anti-sticking layers to
optimize the maximum temperature of hot slumping technology.
