  A modification of the surface structure of the hybrid coating TiN/Al_{2}O_{3}
with a low-energy high-current electron beam (NCEB) is performed. The surface
roughness is considered as a function of beam current. Surfaces of the obtained
samples are investigated within the two-dimensional multifractal detrended
fluctuation analysis (MF-DFA). The multifractal spectrum of the surface is
calculated as a quantitative parameter of the roughness. It is shown that with
an increase of the beam energy, the surface becomes more regular and uniform.
