  In the challenging search for tools that are able to modify surfaces on the
nanometer scale, heavy ions with energies of several 10 MeV are becoming more
and more attractive. In contrast to slow ions where nuclear stopping is
important and the energy is dissipated into a large volume in the crystal, in
the high energy regime the stopping is due to electronic excitations only.
Because of the extremely local (< 1 nm) energy deposition with densities of up
to 10E19 W/cm^2, nanoscaled hillocks can be created under normal incidence.
Usually, each nanodot is due to the impact of a single ion and the dots are
randomly distributed. We demonstrate that multiple periodically spaced dots
separated by a few 10 nanometers can be created by a single ion if the sample
is irradiated under grazing angles of incidence. By varying this angle the
number of dots can be controlled.
