  In this paper, 20nm - 80nm channel length (Lch) InGaAs gate- all-around (GAA)
nanowire MOSFETs with record high on- state and off-state performance have been
demonstrated by equivalent oxide thickness (EOT) and nanowire width (WNW)
scaling down to 1.2nm and 20nm, respectively. SS and DIBL as low as 63mV/dec
and 7mV/V have been demonstrated, indicating excellent interface quality and
scalability. Highest ION = 0.63mA/{\mu}m and gm = 1.74mS/{\mu}m have also been
achieved at VDD=0.5V, showing great promise of InGaAs GAA technology for 10nm
and beyond high-speed low- power logic applications.
