  We propose a method to generate a single peak at a distinct energy in the ion
flux-energy distribution function (IDF) at the electrode surfaces in
capacitively coupled plasmas. The technique is based on the tailoring of the
driving voltage waveform, i.e. adjusting the phases and amplitudes of the
applied harmonics, to optimize the accumulation of ions created by charge
exchange collisions and their subsequent acceleration by the sheath electric
field. The position of the peak (i.e. the ion energy) and the flux of the ions
within the peak of the IDF can be controlled in a wide domain by tuning the
parameters of the applied RF voltage waveform, allowing optimization of various
applications where surface reactions are induced at particular ion energies.
