  The scanning electron microscope (SEM) produces an image of a sample by
scanning it with a focused beam of electrons. The electrons interact with the
atoms in the sample, which emit secondary electrons that contain information
about the surface topography and composition. The sample is scanned by the
electron beam point by point, until an image of the surface is formed. Since
its invention in 1942, SEMs have become paramount in the discovery and
understanding of the nanometer world, and today it is extensively used for both
research and in industry. In principle, SEMs can achieve resolution better than
one nanometer. However, for many applications, working at sub-nanometer
resolution implies an exceedingly large number of scanning points. For exactly
this reason, the SEM diagnostics of microelectronic chips is performed either
at high resolution (HR) over a small area or at low resolution (LR) while
capturing a larger portion of the chip. Here, we employ sparse coding and
dictionary learning to algorithmically enhance LR SEM images of microelectronic
chips up to the level of the HR images acquired by slow SEM scans, while
considerably reducing the noise. Our methodology consists of two steps: an
offline stage of learning a joint dictionary from a sequence of LR and HR
images of the same region in the chip, followed by a fast-online
super-resolution step where the resolution of a new LR image is enhanced. We
provide several examples with typical chips used in the microelectronics
industry, as well as a statistical study on arbitrary images with
characteristic structural features. Conceptually, our method works well when
the images have similar characteristics. This work demonstrates that employing
sparsity concepts can greatly improve the performance of SEM, thereby
considerably increasing the scanning throughput without compromising on
analysis quality and resolution.
