  We describe a sensor for the measurement of thin dielectric layers capable of
operation in a variety of environments. The sensor is obtained by
microfabricating a capacitor with interleaved aluminum fingers, exposed to the
dielectric to be measured. In particular, the device can measure thin layers of
solid frozen from a liquid or gaseous medium. Sensitivity to single atomic
layers is achievable in many configurations and, by utilizing fast, high
sensitivity capacitance read out in a feedback system onto environmental
parameters, coatings of few layers can be dynamically maintained. We discuss
the design, read out and calibration of several versions of the device
optimized in different ways. We specifically dwell on the case in which
atomically thin solid xenon layers are grown and stabilized, in cryogenic
conditions, from a liquid xenon bath.
