  We have developed a state-of-the-art apparatus for laser-based spin- and
angle-resolved photoemission spectroscopy with micrometer spatial resolution
(micro-SARPES). This equipment is achieved through the combination of a
high-resolution photoelectron spectrometer, a 6-eV laser with high photon flux
that is focused down to a few micrometers, a high-precision sample stage
control system, and a double very-low-energy-electron-diffraction spin
detector. The setup achieves an energy resolution of 1.5 (5.5) meV without
(with) the spin detection mode, compatible with a spatial resolution better
than 10 micrometers. This enables us to probe both spatially-resolved
electronic structures and vector information of spin polarization in three
dimensions. The performance of micro-SARPES apparatus is demonstrated by
presenting ARPES and SARPES results from topological insulators and Au
photolithography patterns on a Si (001) substrate.
