  The authors demonstrated that L21-ordered full-Heusler Co2FeSi (CFS) alloy
film with thickness of 100 nm were formed by facing targets sputtering (FTS)
method at a substrate temperature TS = 300 deg C. Degrees of L21- and B2- order
for the film were 0.37, and 0.96, respectively. Furthermore, full-Heusler CFS
alloy thin films with perpendicular magnetic anisotropy (PMA) induced by
MgO-interface magnetic anisotropy were successfully formed by the FTS method.
The CFS/MgO stacking layers showed PMA when dCFS was 0.6 nm <= dCFS <= 1.0 nm.
The PMA in these structures resulted from the CFS/MgO interfacial perpendicular
magnetic anisotropy.
