  We characterize nano-textured surfaces by optical diffraction techniques
using an adapted commercial light microscope with two detectors, a CCD camera
and a spectrometer. The acquisition and analyzing time for the topological
parameters height, width, and sidewall angle is only a few milliseconds of a
grating. We demonstrate that the microscope has a resolution in the nanometer
range, also in an environment with many vibrations, such as a machine floor.
Furthermore, we demonstrate an easy method to find the area of interest with
the integrated CCD camera.
