  The Simons Observatory (SO) is a cosmic microwave background instrumentation
suite in the Atacama Desert of Chile. More than 65,000 polarization-sensitive
transition-edge sensor (TES) bolometers will be fielded in the frequency range
spanning 27 to 280 GHz, with three separate dichroic designs. The mid-frequency
90/150 GHz and ultra-high-frequency 220/280 GHz detector arrays, fabricated at
NIST, account for 39 of 49 total detector modules and implement the
feedhorn-fed orthomode transducer (OMT)-coupled TES bolometer architecture. A
robust production-level fabrication framework for these detector arrays and the
monolithic DC/RF routing wafers has been developed, which includes single
device prototyping, process monitoring techniques, in-process metrology, and
cryogenic measurements of critical film properties. Application of this
framework has resulted in timely delivery of nearly 100 total superconducting
focal plane components to SO with 88% of detector wafers meeting nominal
criteria for integration into a detector module: a channel yield > 95% and Tc
in the targeted range.
