  As one of nanoscale planar structures, metasurface has shown excellent
superiorities on manipulating light intensity, phase and/or polarization with
specially designed nanoposts pattern. It allows to miniature a bulky optical
lens into the chip-size metalens with wavelength-order thickness, playing an
unprecedented role in visible imaging systems (e.g. ultrawide-angle lens and
telephoto). However, a CMOS-compatible metalens has yet to be achieved in the
visible region due to the limitation on material properties such as
transmission and compatibility. Here, we experimentally demonstrate a divergent
metalens based on silicon nitride platform with large numerical aperture
(NA~0.98) and high transmission (~0.8) for unpolarized visible light,
fabricated by a 695-nm-thick hexagonal silicon nitride array with a minimum
space of 42 nm between adjacent nanoposts. Nearly diffraction-limit virtual
focus spots are achieved within the visible region. Such metalens enables to
shrink objects into a micro-scale size field of view as small as a single-mode
fiber core. Furthermore, a macroscopic metalens with 1-cm-diameter is also
realized including over half billion nanoposts, showing a potential application
of wide viewing-angle functionality. Thanks to the high-transmission and
CMOS-compatibility of silicon nitride, our findings may open a new door for the
miniaturization of optical lenses in the fields of optical fibers,
microendoscopes, smart phones, aerial cameras, beam shaping, and other
integrated on-chip devices.
