  Single crystal diamond membranes that host optically active emitters are
highly attractive components for integrated quantum nanophotonics. In this work
we demonstrate bottom-up synthesis of single crystal diamond membranes
containing the germanium vacancy (GeV) color centers. We employ a lift-off
technique to generate the membranes and perform chemical vapour deposition in a
presence of germanium oxide to realize the insitu doping. Finally, we show that
these membranes are suitable for engineering of photonic resonators such as
microring cavities with quality factors of 1500. The robust and scalable
approach to engineer single crystal diamond membranes containing emerging color
centers is a promising pathway for realization of diamond integrated quantum
nanophotonic circuits on a chip.
