  Thin Yttrium Iron Garnet (YIG) is a promising material for integrated
magnonics. In order to introduce YIG into nanofabrication processes it is
necessary to fabricate very thin YIG films with a thickness well below 100 nm
while retaining the extraordinary magnetic properties of the material,
especially its long magnon lifetime and spin wave propagation length. Here, we
give a brief introduction into the topic and we review and discuss the various
results published over the last decade in this area. Especially for ultrathin
films it turns out that pulsed layer deposition and sputtering are the most
promising candidates. In addition, we discuss the application of room
temperature deposition and annealing for lift-off based nanopatterning and the
properties of nanostructures obtained by this method over the past years.
