  The influence of charge trap states in the dielectric boundary material on
capacitively coupled radio frequency plasma discharge is investigated with
theory and Particle in cell/Monte Carlo Collision simulation. It is found that
the trap states of the wall material manipulated discharge properties mainly
through the varying ion induced secondary electron emission (SEE) coefficient
in response to dynamic surface charges accumulated within solid boundary. A
comprehensive SEE model considering surface charging is established first,
which incorporates the valence band electron distribution, electron trap
density, and charge trapping through Auger neutralization and de-excitation.
Theoretical analysis is carried out to reveal the effects of trap states on
sheath solution, stability, plasma density and temperature, particle and power
balance, etc. The theoretical work is supported by simulation results, showing
the reduction of the mean radio frequency sheath potential as
charging-dependent emission coefficient increases. As the gas pressure
increases, a shift of the maximum ionization rate from the bulk plasma center
to the plasma-sheath interface is observed, which is also influenced by the
trap states of the electrode material where the shift happens at a lower
pressure with traps considered. In addition, charge traps are proved helpful
for creating asymmetric plasma discharges with geometrically symmetric
structures, such effect is more pronounced in {\gamma} mode discharges.
