  The High Luminosity Upgrade of the LHC will require the replacement of the
Inner Detector of ATLAS with the Inner Tracker (ITk) in order to cope with
higher radiation levels and higher track densities. Prototype silicon strip
detector modules are currently developed and their performance is studied in
both particle test beams and X-ray beams. In previous test beam studies of
prototype modules, silicon sensor strips were found to respond in regions
varying from the strip pitch of 74.5 {\upmu}m. The variations have been linked
to local features of the sensor architecture. This paper presents results of
detailed sensor measurements in both X-ray and particle beams investigating the
impact of sensor features (metal pads and p-stops) on the responding area of a
sensor strip.
