  In situ low-energy electron microscopy was used to study interlayer mass
transport kinetics during annealing of three-dimensional (3D) TiN(111) mounds,
consisting of stacked 2D islands, at temperatures T between 1550 and 1700 K. At
each T, the islands decay at a constant rate, irrespective of their initial
position in the mounds, indicating that mass is not conserved locally. From
temperature-dependent island decay rates, we obtain an activation energy of
2.8+/-0.3 eV. This is consistent with the detachment-limited decay of 2D TiN
islands on atomically-flat TiN(111) terraces [Phys. Rev. Lett. 89 (2002)
176102], but significantly smaller than the value, 4.5+/-0.2 eV, obtained for
bulk-diffusion-limited spiral step growth [Nature 429, 49 (2004)]. We model the
process based upon step flow, while accounting for step-step interactions, step
permeability, and bulk mass transport. The results show that TiN(111) steps are
highly permeable and exhibit strong repulsive temperature-dependent step-step
interactions that vary between 0.003 and 0.076 eV-nm. The rate-limiting process
controlling TiN(111) mound decay is surface, rather than bulk, diffusion in the
detachment-limited regime.
