  Excellent jet energy measurement is important at the International Linear
Collider (ILC) because most of interesting physics processes decay into
multi-jet final states. We employ a particle flow method to reconstruct
particles, hence International Large Detector (ILD) needs high spatial
resolution which can separate each particle in jets. We study pixelized silicon
sensors as active material of ILD Silicon electro- magnetic calorimeter
(SiECAL). This paper reports studies of temperature and humidity dependence on
dark current and response of laser injection.
