  We have grown superconducting TiN films by atomic layer deposition with
thicknesses ranging from 6 to 89 nm. This deposition method allows us to tune
the resistivity and critical temperature by controlling the film thickness. The
microwave properties are measured, using a coplanar-waveguide resonator, and we
find internal quality factors above a million, high sheet inductances (5.2-620
pH), and pulse response times up to 100 \mu s. The high normal state
resistivity of the films (> 100 \mu\Omega cm) affects the superconducting state
and thereby the electrodynamic response. The microwave response is modeled
using a quasiparticle density of states modified with an effective
pair-breaker,consistently describing the measured temperature dependence of the
quality factor and the resonant frequency.
