  Eigen frequency is one of the most important system responses to be
considered while designing a micro-scale piezoelectric cantilever beam. This
paper investigates and analyzes the effect of dimension parameters of a
micro-scale piezoelectric cantilever beam on its eigen frequency. The beam is
assumed to be made of silicon. Structural mechanics based finite element
analysis is carried out in the environment of COMSOL Multiphysics software for
the study. It is seen that length and thickness have continuous effect on the
eigen frequency; whereas, the effect of width is discontinuous.
