  Multifocal laser direct writing (LDW) based on phase-only spatial light
modulator (SLM) can realize flexible and parallel nanofabrication with high
throughput potential. In this investigation, a novel approach of combining
two-photon absorption, SLM and vector path guided by scalable vector graphics
(SVG) has been developed and tested preliminarily, for fast, flexible and
parallel nanofabrication. Three laser focuses are independently controlled with
different paths, which are according to SVG, to optimize fabrication and
promote time efficiency. The minimum structure width can be as low as 74 nm.
Accompanied with a translation stage, a carp structure of 18.16 $\mu$m by 24.35
$\mu$m has been fabricated. This method shows the possibility of developing LDW
techniques towards full-electrical system, and provides a potential way to
efficiently engrave complex structures on nanoscales.
