  We have used the LTLSM technique for a spatially resolved investigation of
the microwave transport properties, nonlinearities and material inhomogeneities
in an operating coplanar waveguide YBa_2Cu_3O_{7-\delta} (YBCO) microwave
resonator on an LaAlO_3 (LAO) substrate. The influence of twin-domain blocks,
in-plane rotated grains, and micro-cracks in the YBCO film on the nonuniform rf
current distribution were measured with a micrometer-scale spatial resolution.
The impact of the peaked edge currents and rf field penetration into weak links
on the linear device performance were studied as well. The LTLSM capabilities
and its future potential for non-destructive characterization of the microwave
properties of superconducting circuits are discussed.
