  Despite many efforts the origin of a ferromagnetic (FM) response in ZnMnO and
ZnCoO is still not clear. Magnetic investigations of our samples, not discussed
here, show that the room temperature FM response is observed only in alloys
with a non-uniform Mn or Co distribution. Thus, the control of their
distribution is crucial for explanation of contradicted magnetic properties of
ZnCoO and ZnMnO reported till now. In the present review we discuss advantages
of the Atomic Layer Deposition (ALD) growth method, which enables us to control
uniformity of ZnMnO and ZnCoO alloys. Properties of ZnO, ZnMnO and ZnCoO films
grown by the ALD are discussed.
