  Superconducting NbTiN thin films have garnered extensive interest due to
their use in Superconducting Nanowire Single-Photon Detectors (SNSPDs) and
other low-temperature applications for potential use in quantum computing and
nanoelectronics. This study examines structural phase transitions observed in
NbTiN thin films by analyzing the grazing angle x-ray diffraction patterns of a
set of reactive magnetron sputter deposited NbTiN thin films with varying
nitrogen partial pressures in the reactive gas mixture. The superconducting
transition temperature (T_C) of the NbTiN thin films showed a correlation with
the crystal structure, with the highest T_C of 14.26 K obtained for the highly
crystalline FCC phase.
