  The process of dissociation for two hydrofluorocarbon molecules in low
triplet states excited by electron impact in plasma is investigated by ab
initio Molecular Dynamics (AIMD). The interest in dissociation of
hydrofluorocarbons in plasma is motivated by their role in plasma etching in
microelectronic technologies. Dissociation of triplet states is very fast, and
the reaction products can be predicted. In this work, it was found that higher
triplet states relax into the lowest triplet state within a few femtoseconds
due to nonadiabatic dynamics, so that the simplest ab initio MD on the lowest
triplet state seems to give a reasonable estimate of the reaction channels
branching ratios. We provide evidence for the existence of simple rules for the
dissociation of hydrofluorocarbon molecules in triplet states. For molecules
with a double bond, the bonds adjacent to it dissociate faster than the other
bonds.
