  Microelectromechanical system (MEMS) based on-chip resonators offer great
potential for sensing and high frequency signal processing applications due to
their exceptional features like small size, large frequency-quality factor
product, integrability with CMOS ICs, low power consumption etc. This work is
mainly aimed at the design, modeling, simulation, and fabrication of
micromachined polysilicon disk resonators exhibiting radial-contour mode
vibrations. A few other bulk mode modified resonator geometries are also being
explored. The resonator structures have been designed and simulated in
CoventorWare finite-element platform and fabricated by the PolyMUMPs surface
micromachining process.
