  We report the fabrication of few hundred microns long, hundreds of nanometers
wide and 30 nm thick meanders made from YBa2CU3O7. Thin films protected by a 8
nm-thick Ce02 cap layer have been patterned by high energy (a few tens of keV)
oxygen ion irradiation through photoresist masks. DC and RF characterizations
outline good superconducting properties of nano-meanders that could be used as
Superconducting Single Photon Detectors (SSPD). By mean of a resonant method,
their inductance, which mainly sets the maximum speed of these devices, has
been measured on a wide range of temperature. It compares favorably with
expected values calculated from the geometry of the meanders and the known
London penetration depth in YBa2CU3O7.
