  Metalenses, which exhibit superior light-modulating performance with
sub-micrometer-scale thicknesses, are suitable alternatives to conventional
bulky refractive lenses. However, fabrication limitations, such as a high cost,
low throughput, and small patterning area, hinder their mass production. Here,
we demonstrate the mass production of low-cost, high-throughput, and
large-aperture visible metalenses using an argon fluoride immersion scanner and
wafer-scale nanoimprint lithography. Once a 12-inch master stamp is imprinted,
hundreds of centimeter-scale metalenses can be fabricated. To enhance light
confinement, the printed metasurface is thinly coated with a high-index film,
resulting in drastic increase of conversion efficiency. As a proof of concept,
a prototype of a virtual reality device with ultralow thickness is demonstrated
with the fabricated metalens.
