  The LiF target preparation on self-supporting Ag backing (LiF/Ag) is
discussed in a detailed manner using vacuum evaporation process. The target
thickness is measured using the energy loss of three line alpha source. 183.74
{\mu}g/cm 2 thickness of LiF is achieved through the evaporation process. Good
uniformity of targets is observed. Non-uniformity in targets is found within 6
%. The XPS analysis confirms the presence of both the F and Li atoms on sample
surface.
