  In this study, we developed an automated, multipoint primary accelerometer
calibration system using a two-axis positioning stage and a heterodyne laser
interferometer. The proposed system offers low-cost, convenient, and automated
multipoint accelerometer calibration, enabling less calibration lead time. The
positioning stage also offers better positioning repeatability of 1 um, which
is impossible through manual alignments. We measured the surface deformation of
a laser reflection adaptor for a single-ended accelerometer by measuring more
than 450 measurement positions. Visualizing the deformation of laser reflection
surfaces facilitates understanding the effects of deformation or nonrectilinear
motion, which are among the most significant uncertainty components in
high-frequency accelerometer calibrations.
