  We study the evolution of perpendicularly magnetized tunnel junctions under
300 to 400 $^{\circ}$C annealing. The hysteresis loops do not evolve much
during annealing and they are not informative of the underlying structural
evolutions. These evolutions are better revealed by the frequencies of the
ferromagnetic resonance eigenmodes of the tunnel junction. Their modeling
provides the exchange couplings and the layers' anisotropies within the stack
which can serve as a diagnosis of the tunnel junction state after each
annealing step. The anisotropies of the two CoFeB-based parts and the two
Co/Pt-based parts of the tunnel junction decay at different rates during
annealing. The ferromagnet exchange coupling through the texture-breaking Ta
layer fails above 375$^{\circ}$C. The Ru spacer meant to promote a synthetic
antiferromagnet behavior is also insufficiently robust to annealing. Based on
these evolutions we propose optimization routes for the next generation tunnel
junctions.
