  CLIC is a proposed linear $e^+e^-$ collider with center-of-mass energies of
up to 3 TeV. Its main objectives are precise top quark, Higgs boson and Beyond
Standard Model physics. In addition to spatial resolutions of a few micrometers
and a very low material budget, the vertex and tracking detectors also require
timing capabilities with a precision of a few nanoseconds to allow suppression
of beam-induced background particles. Different technologies using hybrid
silicon detectors are explored for the vertex detectors, such as dedicated 65
nm readout ASICs, small-pitch sensors as well as bonding using anisotropic
conductive films. Monolithic sensors are the current choice for the tracking
detector, and a prototype using a 180 nm high-resistivity CMOS process has been
designed and produced, and is currently under evaluation. Different designs
using a silicon-on-insulator process are under investigation for both vertex
and tracking detector. All prototypes are tested in laboratory and beam tests,
and newly developed simulation tools combining Geant4 and TCAD are used to
assess and optimize their performance. This contribution gives an overview of
the R&D program for the CLIC vertex and tracking detectors, highlighting new
results from the prototypes.
