  The European Research Council has recently funded HOLMES, a project with the
aim of performing a calorimetric measurement of the electron neutrino mass
measuring the energy released in the electron capture decay of 163Ho. The
baseline for HOLMES are microcalorimeters coupled to Transition Edge Sensors
(TESs) read out with rf-SQUIDs, for microwave multiplexing purposes. A
promising alternative solution is based on superconducting microwave
resonators, that have undergone rapid development in the last decade. These
detectors, called Microwave Kinetic Inductance Detectors (MKIDs), are
inherently multiplexed in the frequency domain and suitable for even
larger-scale pixel arrays, with theoretical high energy resolution and fast
response. The aim of our activity is to develop arrays of microresonator
detectors for X-ray spectroscopy and suitable for the calorimetric measurement
of the energy spectra of 163Ho. Superconductive multilayer films composed by a
sequence of pure Titanium and stoichiometric TiN layers show many ideal
properties for MKIDs, such as low loss, large sheet resistance, large kinetic
inductance, and tunable critical temperature $T_c$. We developed Ti/TiN
multilayer microresonators with $T_c$ within the range from 70 mK to 4.5 K and
with good uniformity. In this contribution we present the design solutions
adopted, the fabrication processes and the characterization results.
