  We report growth of superconducting Sr2RuO4 films by oxide molecular beam
epitaxy (MBE). Careful tuning of the Ru flux with an electron beam evaporator
enables us to optimize growth conditions including the Ru/Sr flux ratio and
also to investigate stoichiometry effects on the structural and transport
properties. The highest onset transition temperature of about 1.1 K is observed
for films grown in a slightly Ru-rich flux condition in order to suppress Ru
deficiency. The realization of superconducting Sr2RuO4 films via oxide MBE
opens up a new route to study the unconventional superconductivity of this
material.
