  Averaged plasma parameters such as electron distribution function and
electron density are determined by characterization of high frequency (2.4 GHz)
nitrogen-plasma using both experimental methods, namely optical emission
spectroscopy (OES) and microphotography, and numerical simulation. Both direct
and stepwise electron-impact excitation of nitrogen emissions are considered.
The determination of space-resolved electron distribution function, electron
density, rate constant for electron-impact dissociation of nitrogen molecule
and the production of nitrogen atoms, applying the same methods, is discussed.
Spatial distribution of intensities of neutral nitrogen molecule and nitrogen
molecular ion from the microplasma is imaged by a CCD camera. The CCD images
are calibrated using the corresponding emissions measured by
absolutely-calibrated OES, and are then subjected to inverse Abel
transformation to determine space-resolved intensities and other parameters.
The space-resolved parameters are compared, respectively, with the averaged
parameters, and an agreement between them is established.
