  During laser micro-polishing, the constant control of laser energy density is
a key technology to improve the surface roughness. In this paper, a method
which controls the energy density of UV(ultraviolet) pulse laser in real time
with the control of CW(continuous wave) laser spot size in laser
micro-polishing for metallic surface was presented. The experimental and
analytical considerations of several influence factors such as laser spot size,
fusion zone and focal offset were investigated. In addition, using a laser
micro-polishing system manufactured with this method, the laser micro-polishing
experiments on the two different surface shapes of stainless steel 316L were
conducted. For the inclined or curved surface, the surface roughness
improvements of up to 56.4% and 57.3% were respectively obtained, and the
analysis of the results were discussed.
