  The in-place growth of suspended carbon nanotubes facilitates the observation
of both unperturbed electronic transport spectra and high-Q vibrational modes.
For complex structures integrating, e.g., superconducting rf elements on-chip,
selection of a chemically and physically resistant material that survives the
chemical vapor deposition (CVD) process provides a challenge. We demonstrate
the implementation of molybdenum-rhenium coplanar waveguide resonators that
exhibit clear resonant behaviour at cryogenic temperatures even after having
been exposed to nanotube growth conditions. The properties of the MoRe devices
before and after CVD are compared to a reference niobium device.
