  A micro-pressure sensor with an isosceles trapezoidal beam-membrane (ITBM) is
proposed in this paper, consisting of a square silicon membrane, four isosceles
trapezoidal beams and four piezoresistors.To investigate how the elastic
silicon membrane affects pressure sensitive characteristics, a simulation
models based on ANSYS 15.0 software were used to analyze the effect of
structural dimension on characteristics of pressure sensor. According to that,
the chips of micro-pressure sensors were fabricated by micro-electro-mechanical
system (MEMS) technology on a silicon wafer with <100> orientation.The
experimental results show that the proposed sensor achieves a better
sensitivity of 9.64 mV/kPa and an excellent linearity of 0.09%F.S. in the range
of 0~3.0 kPa at room temperature and a supply voltage of 5.0 V,with a super
temperature coefficient of sensitivity(TCS) about - 684 ppm/K from 235.15 K to
360.15 K and low pressure measurement less than 3.0 kPa.
