  Focused electron beam induced deposition (FEBID) is a direct-write method for
the fabrication of nanostructures whose lateral resolution rivals that of
advanced electron lithography but is in addition capable of creating complex
three-dimensional nano-architectures. Over the last decade several new
developments in FEBID and focused electron beam induced processing (FEBIP) have
led to a growing number of scientific contributions in solid state physics and
materials science based on FEBID-specific materials and particular shapes and
arrangements of the employed nanostructures. In this review an attempt is made
to give a broad overview of these developments and the resulting contributions
in various research fields encompassing mesoscopic physics with nanostructured
metals at low temperatures, direct-write of superconductors and nano-granular
alloys or intermetallic compounds and their applications, the contributions of
FEBID to the field of metamaterials, and the application of FEBID structures
for sensing of force or strain, dielectric changes or magnetic stray fields.
The very recent development of FEBID towards simulation-assisted growth of
complex three-dimensional nano-architectures is also covered. In the review
particular emphasis is laid on conceptual clarity in the description of the
different developments, which is reflected in the mostly schematic nature of
the presented figures, as well as in the recurring final sub-sections for each
of the main topics discussing the respective "challenges and perspectives".
