  Magnetic force microscopy is a widespread technique for imaging magnetic
structures with a resolution of some 10 nanometers. MFM can be calibrated to
obtain quantitative spatially resolved magnetization data in units of A/m by
determining the calibrated point spread function of the instrument, its
instrument calibration function (ICF), from a measurement of a well-known
reference sample. Beyond quantifying the MFM data, a deconvolution of the MFM
image data with the ICF also corrects the smearing caused by the finite width
of the MFM tip stray field distribution. However, the quality of the
calibration depends critically on the calculability of the magnetization
distribution of the reference sample. Here, we discuss a Ti/Pt/Co multilayer
stack that shows a stripe domain pattern as a suitable reference material. A
precise control of the fabrication process, combined with a characterization of
the sample micromagnetic parameters, allows reliable calculation of the
sample's magnetic stray field, proven by a very good agreement between
micromagnetic simulations and qMFM measurements. A calibrated qMFM measurement
using the Ti/Pt/Co stack as a reference sample is shown and validated, and the
application area for quantitative MFM measurements calibrated with the Ti/Pt/Co
stack is discussed
