  The temperature-dependent composition and phase formation during physical
vapor deposition (PVD) of Mg-Ca thin films is modelled using a CALPHAD-based
approach. Considering the Mg and Ca sublimation fluxes calculated based on the
vapor pressure obtained by employing equilibrium thermochemical calculations,
experimentally observed synthesis temperature trends in thin film composition
and phase formation are reproduced. The model is a significant step towards
understanding how synthesis parameters control composition and thereby phase
formation in PVD of metals with high vapor pressures.
