  One-shot full-field surface profilometry using digital diffractive-confocal
imaging correlation microscope based on digital micromirror device is developed
for one-shot microscopic 3D surface measurement. Optical configuration applies
confocal microscope setup and was building on DMD to generate specific pinhole
array arrangement for minimizing cross talk effect. An innovative method was
invented to create normalized cross correlation depth response curve from
diffraction patterns of the pinhole. Using this approach, the sub-micrometer
scale depth can be detected with high accuracy and precision.
