  Positron lifetime spectroscopy was used to study native vacancy defects in
semi-insulating silicon carbide. The material is shown to contain (i) vacancy
clusters consisting of 4--5 missing atoms and (ii) Si vacancy related
negatively charged defects. The total open volume bound to the clusters
anticorrelates with the electrical resistivity both in as-grown and annealed
material. Our results suggest that Si vacancy related complexes compensate
electrically the as-grown material, but migrate to increase the size of the
clusters during annealing, leading to loss of resistivity.
