  The Electrical Resistance Tomography (ERT) technique is applied to the
measurement of sheet conductance maps of both uniform and patterned conductive
thin films. Images of the sheet conductance spatial distribution, and local
conductivity values are obtained. Test samples are tin oxide films on glass
substrates, with electrical contacts on the sample boundary, some samples are
deliberately patterned in order to induce null conductivity zones of known
geometry while others contain higher conductivity inclusions. Four-terminal
resistance measurements among the contacts are performed with a scanning setup.
The ERT reconstruction is performed by a numerical algorithm based on the total
variation regularization and the L-curve method. ERT correctly images the sheet
conductance spatial distribution of the samples. The reconstructed conductance
values are in good quantitative agreement with independent measurements
performed with the van der Pauw and the four-point probe methods.
