  We demonstrate simultaneous measurements of the charge state, energy and
angular distribution of keV ions in transmission experiments through
self-supporting foils. Using a time-of-flight approach we have introduced an
electrostatic deflection apparatus as an extension to existing medium energy
ion scattering (MEIS) instrumentation. Different positive, neutral and negative
charge states have been discriminated and quantified for initially singly
charged beams of He, N, O and Ne in the energy range from 25 to 250 keV. In
parallel, the ion energy after interaction with the target has been assessed
for all detected particles, while particles can be discriminated by deflection
angle. Self-supporting thin carbon foils were used as samples to benchmark our
experiments with literature data where available.
