  Sub-micro structured surfaces allow modifying the behavior of polymer films
or components. Especially in micro fluidics a lotus-like characteristic is
requested for many applications. Structure details with a high aspect ratio are
necessary to decouple the bottom and the top of the functional layer. Unlike to
stochastic methods, patterning with a LIGA-mold insert it is possible to
structure surfaces very uniformly or even with controlled variations (e.g. with
gradients). In this paper we present the process chain to realize polymer
sub-micro structures with minimum lateral feature size of 400 nm and up to 4
micrometers high.
