  Lithium Niobate (LN or just niobate) thin-film micro-photonic resonators have
promising prospects in many applications including high efficiency
electro-optic modulators, optomechanics and nonlinear optics. This paper
presents free-standing thin-film lithium niobate photonic resonators on a
silicon platform using MEMS fabrication technology. We fabricated a 35um radius
niobate disk resonator that exhibits high intrinsic optical quality factor (Q)
of 484,000. Exploiting the optomechanical interaction from the released
free-standing structure and high optical Q, we were able to demonstrate
acousto-optic modulation from these devices by exciting a 56MHz radial
breathing mechanical mode (mechanical Q of 2700) using a probe.
