  Irradiation of a solid with intense plasma ion beams produced by Rod Plasma
Injector is a strongly nonequilibrium process, which enables achieving a number
of effects which are impossible to be achieved with other method. In the paper,
the process of plasma ion beam propagation regarding its time and energy
distributions and the process of ion penetration of solids, resulting with ion
implementation and temperature growth have been analyzed mathematically on
basis of experimental data. Results of numerical calculations have been
presented concerning temperature and dopant density time evolution.
