  The use of oxide materials in oxide electronics requires their controlled
epitaxial growth. Recently, it was shown that Reflection High Energy Electron
Diffraction (RHEED) allows to monitor the growth of oxide thin films even at
high oxygen pressure. Here, we report the sub-unit cell molecular or block
layer growth of the oxide materials Sr2RuO4, MgO, and magnetite using Pulsed
Laser Deposition (PLD) from stoichiometric targets. Whereas for perovskites
such as SrTiO3 or doped LaMnO3 a single RHEED intensity oscillation is found to
correspond to the growth of a single unit cell, in materials where the unit
cell is composed of several molecular layers or blocks with identical
stoichiometry, a sub-unit cell molecular or block layer growth is established
resulting in several RHEED intensity oscillations during the growth of a single
unit-cell.
