  We demonstrate a z-axis accelerometer which uses waveguided light to sense
proof mass displacement. The accelerometer consists of two stacked rings (one
fixed and one suspended above it) forming an optical ring resonator. As the
upper ring moves due to z-axis acceleration, the effective refractive index
changes, changing the optical path length and therefore the resonant frequency
of the optical mode. The optical transmission changes with acceleration when
the laser is biased on the side of the optical resonance. This silicon nitride
"Cavity-enhanced OptoMechanical Accelerometer" (COMA) has a sensitivity of 22
percent-per-g optical modulation for our highest optical quality factor (Q_o)
devices
