  We demonstrate control of the carrier density of single phase anatase TiO2
thin films by nearly two orders of magnitude by modulating the growth kinetics
during pulsed laser deposition, under fixed thermodynamic conditions. The
resistivity and the intensity of the photoluminescence spectra of these TiO2
samples, both of which correlate with the number of oxygen vacancies, are shown
to depend strongly on the growth rate. A quantitative model is used to explain
the carrier density changes.
