  Optomechanical resonators were fabricated on a silicon-on-insulator (SOI)
substrate that had been implanted with phosphorus donors. The resonators'
mechanical and optical properties were then measured (at 6 kelvin and room
temperature) before and after the substrate was annealed. All measured
resonators survived the annealing and their mechanical linewidths decreased
while their optical and mechanical frequencies increased. This is consistent
with crystal lattice damage from the ion implantation causing the optical and
mechanical properties to degrade and then subsequently being repaired by the
annealing. We explain these effects qualitatively with changes in the silicon
crystal lattice structure. We also report on some unexplained features in the
pre-anneal samples. In addition, we report partial fabrication of
optomechanical resonators with neon ion milling.
