  Specific contact resistivity measurements have conventionally been heavy in
both fabrication and simulation/calculation in order to account for complicated
geometries and other effects such as parasitic resistance. We propose a simpler
geometry to deliver current, and the use of a scanning voltage probe to sense
the potential variation along the sample surface, from which the specific
contact resistivity can be straightforwardly deduced. We demonstrate an
analytical example in the case where both materials are thin films.
Experimental data with a scanning Kelvin probe measurement on graphene from the
literature corroborates our model calculation.
