  High sensitivity MEMS pressure sensor chip for different ranges (1 to 60 kPa)
utilizing the novel electrical circuit of piezosensitive differential amplifier
with negative feedback loop (PDA-NFL) is developed. Pressure sensor chip
PDA-NFL utilizes two bipolar-junction transistors (BJT) with vertical n-p-n
type structure (V-NPN) and eight piezoresistors (p-type). Both theoretical
model of sensor response to pressure and temperature and experimental data are
presented. Data confirms the applicability of theoretical model. Introduction
of the amplifier allows for decreasing chip size while keeping the same
sensitivity as a chip with classic Wheatstone bridge circuit.
