  Uniform amorphous carbon film is deposited on the inner surface of quartz
tube having the inner diameter of 6 mm and the outer diameter of 8 mm. A pulsed
filamentary plasma source is used for the deposition. Long plasma filaments (~
140 mm) as a positive discharge are generated inside the tube in argon with
methane admixture. FTIR-ATR, XRD, SEM, LSM and XPS analyses give the conclusion
that deposited film is amorphous composed of non-hydrogenated sp2 carbon and
hydrogenated sp3 carbon. Plasma is characterized using optical emission
spectroscopy, voltage-current measurement, microphotography and numerical
simulation. On the basis of observed plasma parameters, the kinetics of the
film deposition process is discussed.
