  Surface-patterned ZnO thin films were fabricated by direct imprinting on ZnO
sol and subsequent annealing process. The polymer-based ZnO sols were deposited
on various substrates for the nanoimprint lithography and converted to
surface-patterned ZnO gel films during the thermal curing nanoimprint process.
Finally, crystalline ZnO films were obtained by subsequent annealing of the
patterned ZnO gel films. The optical characterization indicates that the
surface patterning of ZnO thin films can lead to an enhanced transmittance.
Large-scale ZnO thin films with different patterns can be fabricated by various
easy-made ordered templates using this combination of sol-gel and nanoimprint
lithography techniques.
