  A wide variety of feed gases are used to generate low-temperature plasmas for
the microelectronics and the sustainability applications. These plasmas often
have a complex combination of reactive and non-reactive species which may have
spatial and temporal variations in the density, the temperature and the energy.
Accurate knowledge of these parameters and their variations is critically
important for understanding and advancing these applications through validated
and predictive modeling and design of relevant devices. Laser-induced
fluorescence (LIF) provides both spatial and temporally resolved information
about the plasma-produced radicals, ions, and metastables. However, the use of
this powerful diagnostic tool requires the knowledge of optical transitions
including excitation and fluorescence wavelengths which may not be available or
scattered through a huge literature domain. In this manuscript, we collected,
analyzed and compiled the available transitions for laser-induced fluorescence
for more than 160 chemical species relevant to the microelectronics industry
and the sustainability applications. A list of species with overlapping LIF
excitation and fluorescence wavelengths have been identified. This summary is
intended to serve as a data reference for LIF transitions and should be updated
in the future.
