  In this paper, the electrical characteristics of the Gaseous Electronics
Conference (GEC) reference cell with impedance matching are investigated
through a two-dimensional electrostatic implicit Particle-in-Cell/Monte Carlo
Collision (PIC/MCC) model in an axisymmetric coordinate system. The coupling
between the complex reactor geometry and the external circuit is included via
an equivalent capacitance calculated from the electric energy density. The
results of this model are compared with experimental measurements and other
model calculations and show good agreement. This simulation obtains the plasma
kinetics of the capacitively coupled discharge process at low pressure and
detailed external circuit responses, including power transmission, reflection,
and higher-order harmonics in the circuit, which provides important insights
for impedance-matching design in semiconductor plasma processing.
