  Atomic layer deposition (ALD), a layer-by-layer controlled method to
synthesize ultrathin materials, provides various merits over other techniques
such as precise thickness control, large area scalability and excellent
conformality. Here we demonstrate the possibility of using ALD growth on top of
suspended 2D materials to fabricate nanomechanical resonators. We fabricate ALD
nanomechanical resonators consisting of a graphene/MoS$_2$ heterostructure.
Using AFM indentation and optothermal drive, we measure their mechanical
properties including Young's modulus, resonance frequency and quality factor,
showing similar values as their exfoliated and chemical vapor deposited
counterparts. We also demonstrate the fabrication of nanomechanical resonators
by exfoliating an ALD grown NbS$_2$ layer. This study exemplifies the potential
of ALD techniques to produce high-quality suspended nanomechanical membranes,
providing a promising route towards high-volume fabrication of future
multilayer nanodevices and nanoelectromechanical systems.
