  Electron tomography offers important three-dimensional (3D) structural
information which cannot be observed by two-dimensional imaging. By combining
annular dark field scanning transmission electron microscopy (ADF-STEM) with
aberration correction, the resolution of electron tomography has reached atomic
resolution. However, tomography based on ADF-STEM inherently suffers from
several issues, including a high electron dose requirement, poor contrast for
light elements, and artifacts from image contrast nonlinearity. Here, we
developed a new method called MultiSlice Electron Tomography (MSET) based on
4D-STEM tilt series. Our simulations show that multislice-based 3D
reconstruction can effectively reduce undesirable reconstruction artifacts from
the nonlinear contrast, allowing precise determination of atomic structures
with improved sensitivity for low-Z elements, at considerably low electron dose
conditions. We expect that the MSET method can be applied to a wide variety of
materials, including radiation-sensitive samples and materials containing light
elements whose 3D atomic structures have never been fully elucidated due to
electron dose limitations or nonlinear imaging contrast.
